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Title: Near field optical scanning system employing microfabricated solid immersion lens

Abstract

A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.

Inventors:
 [1];  [2];  [1];  [1];  [1]
  1. Stanford, CA
  2. Menlo Park, CA
Issue Date:
Research Org.:
Stanford Univ., CA (United States)
OSTI Identifier:
874687
Patent Number(s):
6441359
Application Number:
09/414674
Assignee:
The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG03-90ER14157
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
near; field; optical; scanning; employing; microfabricated; solid; immersion; lens; integrated; flexible; support; cantilever; membrane; described; method; forming; structure; flexible support; /250/

Citation Formats

Cozier, Kenneth B, Fletcher, Daniel A, Kino, Gordon S, Quate, Calvin F, and Soh, Hyongsok T. Near field optical scanning system employing microfabricated solid immersion lens. United States: N. p., 2002. Web.
Cozier, Kenneth B, Fletcher, Daniel A, Kino, Gordon S, Quate, Calvin F, & Soh, Hyongsok T. Near field optical scanning system employing microfabricated solid immersion lens. United States.
Cozier, Kenneth B, Fletcher, Daniel A, Kino, Gordon S, Quate, Calvin F, and Soh, Hyongsok T. Tue . "Near field optical scanning system employing microfabricated solid immersion lens". United States. https://www.osti.gov/servlets/purl/874687.
@article{osti_874687,
title = {Near field optical scanning system employing microfabricated solid immersion lens},
author = {Cozier, Kenneth B and Fletcher, Daniel A and Kino, Gordon S and Quate, Calvin F and Soh, Hyongsok T},
abstractNote = {A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

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Works referenced in this record:

Solid‐state processes to produce hemispherical components for inertial fusion targets
journal, April 1981


Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research
journal, May 1979