Miniature piezo electric vacuum inlet valve
Abstract
A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three.
- Inventors:
-
- Valley Springs, CA
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 871427
- Patent Number(s):
- 5730417
- Application Number:
- 08/650751
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16K - VALVES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- miniature; piezo; electric; vacuum; inlet; valve; fast; pulse; rate; battery; operated; variable; flow; capability; power; watts; milliseconds; utilized; mass; spectroscopic; applications; pulsed; continuous; conditions; minimal; dead; volume; 01; std; cc; utilize; example; 12; vdc; input; 750; output; supply; compared; conventional; valves; require; preloading; crystal; drive; mechanism; 120; vac; factor; variable flow; inlet valve; dc input; battery operated; drive mechanism; continuous flow; piezo electric; dead volume; power supply; output power; pulse rate; flow conditions; miniature piezo; minimal dead; mass spectroscopic; vacuum inlet; electric vacuum; /251/
Citation Formats
Keville, Robert F, and Dietrich, Daniel D. Miniature piezo electric vacuum inlet valve. United States: N. p., 1998.
Web.
Keville, Robert F, & Dietrich, Daniel D. Miniature piezo electric vacuum inlet valve. United States.
Keville, Robert F, and Dietrich, Daniel D. Tue .
"Miniature piezo electric vacuum inlet valve". United States. https://www.osti.gov/servlets/purl/871427.
@article{osti_871427,
title = {Miniature piezo electric vacuum inlet valve},
author = {Keville, Robert F and Dietrich, Daniel D},
abstractNote = {A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 24 00:00:00 EST 1998},
month = {Tue Mar 24 00:00:00 EST 1998}
}
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