Miniature piezo electric vacuum inlet valve
Abstract
A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability is disclosed. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three. 6 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 597137
- Patent Number(s):
- 5730417
- Application Number:
- PAN: 8-650,751
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 24 Mar 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 40 CHEMISTRY; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; VALVES; MASS SPECTROMETERS; ELECTRIC CONTROLLERS; MINIATURIZATION; POWER SUPPLIES; DESIGN; PIEZOELECTRICITY
Citation Formats
Keville, R F, and Dietrich, D D. Miniature piezo electric vacuum inlet valve. United States: N. p., 1998.
Web.
Keville, R F, & Dietrich, D D. Miniature piezo electric vacuum inlet valve. United States.
Keville, R F, and Dietrich, D D. Tue .
"Miniature piezo electric vacuum inlet valve". United States.
@article{osti_597137,
title = {Miniature piezo electric vacuum inlet valve},
author = {Keville, R F and Dietrich, D D},
abstractNote = {A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability is disclosed. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three. 6 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {3}
}
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