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Title: Miniature piezo electric vacuum inlet valve

Abstract

A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability is disclosed. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three. 6 figs.

Inventors:
;
Issue Date:
Research Org.:
Univ. of California (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
597137
Patent Number(s):
5730417
Application Number:
PAN: 8-650,751
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 24 Mar 1998
Country of Publication:
United States
Language:
English
Subject:
40 CHEMISTRY; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; VALVES; MASS SPECTROMETERS; ELECTRIC CONTROLLERS; MINIATURIZATION; POWER SUPPLIES; DESIGN; PIEZOELECTRICITY

Citation Formats

Keville, R F, and Dietrich, D D. Miniature piezo electric vacuum inlet valve. United States: N. p., 1998. Web.
Keville, R F, & Dietrich, D D. Miniature piezo electric vacuum inlet valve. United States.
Keville, R F, and Dietrich, D D. Tue . "Miniature piezo electric vacuum inlet valve". United States.
@article{osti_597137,
title = {Miniature piezo electric vacuum inlet valve},
author = {Keville, R F and Dietrich, D D},
abstractNote = {A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability is disclosed. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three. 6 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {3}
}