High resolution EUV monochromator/spectrometer
Abstract
This invention is related to a monochromator which employs a spherical mirror, a traveling plane mirror with simultaneous rotation, and a varied spacing plane grating. The divergent beam from the entrance slit is converged by the spherical mirror located at the various positions in the monochromator depending of the inventive system. To provide the meaningful diffraction efficiencies and to reduce unwanted higher order lights, the deviation angle subtending the incidence and diffraction beams for the plane grating is varied with the position of the traveling plane mirror with simultaneous rotation located in the front or back of the plane grating with wavelength scanning. The outgoing beam from the monochromator goes through the fixed exit slit and has same beam direction regardless of the scanning wavelength. The combination of properly designed motions of the plane mirror and novel varied-spacing parameters of the inventive plane grating corrects the aberrations and focuses the monochromatic spectral image on the exit slit, enabling measurements at high spectral resolution.
- Inventors:
-
- Moraga, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 870481
- Patent Number(s):
- 5528364
- Assignee:
- Regents, University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- resolution; euv; monochromator; spectrometer; related; employs; spherical; mirror; traveling; plane; simultaneous; rotation; varied; spacing; grating; divergent; beam; entrance; slit; converged; located; various; positions; depending; inventive; provide; meaningful; diffraction; efficiencies; reduce; unwanted; lights; deviation; angle; subtending; incidence; beams; position; front; wavelength; scanning; outgoing; fixed; exit; direction; regardless; combination; properly; designed; motions; novel; varied-spacing; parameters; corrects; aberrations; focuses; monochromatic; spectral; image; enabling; measurements; plane grating; plane mirror; beam direction; spherical mirror; spectral image; various positions; mirror located; entrance slit; outgoing beam; /356/250/359/378/
Citation Formats
Koike, Masako. High resolution EUV monochromator/spectrometer. United States: N. p., 1996.
Web.
Koike, Masako. High resolution EUV monochromator/spectrometer. United States.
Koike, Masako. Mon .
"High resolution EUV monochromator/spectrometer". United States. https://www.osti.gov/servlets/purl/870481.
@article{osti_870481,
title = {High resolution EUV monochromator/spectrometer},
author = {Koike, Masako},
abstractNote = {This invention is related to a monochromator which employs a spherical mirror, a traveling plane mirror with simultaneous rotation, and a varied spacing plane grating. The divergent beam from the entrance slit is converged by the spherical mirror located at the various positions in the monochromator depending of the inventive system. To provide the meaningful diffraction efficiencies and to reduce unwanted higher order lights, the deviation angle subtending the incidence and diffraction beams for the plane grating is varied with the position of the traveling plane mirror with simultaneous rotation located in the front or back of the plane grating with wavelength scanning. The outgoing beam from the monochromator goes through the fixed exit slit and has same beam direction regardless of the scanning wavelength. The combination of properly designed motions of the plane mirror and novel varied-spacing parameters of the inventive plane grating corrects the aberrations and focuses the monochromatic spectral image on the exit slit, enabling measurements at high spectral resolution.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}