ECR ion source with electron gun
Abstract
An Advanced Electron Cyclotron Resonance ion source (10) having an electron gun (52) for introducing electrons into the plasma chamber (18) of the ion source (10). The ion source (10) has a injection enclosure (12) and a plasma chamber tank (14). The plasma chamber (18) is defined by a plurality of longitudinal magnets (16). The electron gun (52) injects electrons axially into the plasma chamber (18) such that ionization within the plasma chamber (18) occurs in the presence of the additional electrons produced by the electron gun (52). The electron gun (52) has a cathode (116) for emitting electrons therefrom which is heated by current supplied from an AC power supply (96) while bias potential is provided by a bias power supply (118). A concentric inner conductor (60) and Outer conductor (62) carry heating current to a carbon chuck (104) and carbon pusher (114) Which hold the cathode (116) in place and also heat the cathode (16). In the Advanced Electron Cyclotron Resonance ion source (10), the electron gun (52) replaces the conventional first stage used in prior art electron cyclotron resonance ion generators.
- Inventors:
-
- El Cerrito, CA
- Berkeley, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 868989
- Patent Number(s):
- 5256938
- Assignee:
- United States of America as represented by Department of Energy (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- ecr; source; electron; gun; advanced; cyclotron; resonance; 10; 52; introducing; electrons; plasma; chamber; 18; injection; enclosure; 12; tank; 14; defined; plurality; longitudinal; magnets; 16; injects; axially; ionization; occurs; presence; additional; produced; cathode; 116; emitting; therefrom; heated; current; supplied; power; supply; 96; bias; potential; provided; 118; concentric; inner; conductor; 60; outer; 62; carry; heating; carbon; chuck; 104; pusher; 114; hold; heat; replaces; conventional; stage; prior; generators; bias potential; electron cyclotron; outer conductor; power supply; inner conductor; electron gun; cyclotron resonance; plasma chamber; additional electrons; heating current; current supplied; carry heat; concentric inner; /315/313/
Citation Formats
Xie, Zu Q, and Lyneis, Claude M. ECR ion source with electron gun. United States: N. p., 1993.
Web.
Xie, Zu Q, & Lyneis, Claude M. ECR ion source with electron gun. United States.
Xie, Zu Q, and Lyneis, Claude M. Fri .
"ECR ion source with electron gun". United States. https://www.osti.gov/servlets/purl/868989.
@article{osti_868989,
title = {ECR ion source with electron gun},
author = {Xie, Zu Q and Lyneis, Claude M},
abstractNote = {An Advanced Electron Cyclotron Resonance ion source (10) having an electron gun (52) for introducing electrons into the plasma chamber (18) of the ion source (10). The ion source (10) has a injection enclosure (12) and a plasma chamber tank (14). The plasma chamber (18) is defined by a plurality of longitudinal magnets (16). The electron gun (52) injects electrons axially into the plasma chamber (18) such that ionization within the plasma chamber (18) occurs in the presence of the additional electrons produced by the electron gun (52). The electron gun (52) has a cathode (116) for emitting electrons therefrom which is heated by current supplied from an AC power supply (96) while bias potential is provided by a bias power supply (118). A concentric inner conductor (60) and Outer conductor (62) carry heating current to a carbon chuck (104) and carbon pusher (114) Which hold the cathode (116) in place and also heat the cathode (16). In the Advanced Electron Cyclotron Resonance ion source (10), the electron gun (52) replaces the conventional first stage used in prior art electron cyclotron resonance ion generators.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1993},
month = {Fri Jan 01 00:00:00 EST 1993}
}