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Title: Ion-plasma gun for ion-milling machine

Abstract

An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat electrode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.

Inventors:
 [1];  [2]
  1. Hinsdale, IL
  2. (Hinsdale, IL)
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
OSTI Identifier:
862721
Patent Number(s):
3995186
Assignee:
United States of America as represented by United States Energy (Washington, DC)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
ion-plasma; gun; ion-milling; machine; elongated; electrode; hollow; portion; closed; perforated; plate; positioned; parallel; flat; opposite; electrical; polarity; insulated; sleeve; encompasses; extends; outwardly; towards; length; separated; portions; materials; formed; high-temperature; material; initiated; source; extending; remainder; resilient; enhanced; seal-forming; ability; retention; plasma; gas; perforations; arranged; mutually; opposing; triangular; pattern; beam; current; profile; target; requiring; precision; milling; temperature material; plasma gas; plasma gun; positioned parallel; extends outwardly; elongated electrode; hollow portion; portion extending; resilient material; opposite electrical; extends outward; milling machine; sleeve portion; /313/219/

Citation Formats

Kaminsky, Manfred S, and Campana, Jr., Thomas J. Ion-plasma gun for ion-milling machine. United States: N. p., 1976. Web.
Kaminsky, Manfred S, & Campana, Jr., Thomas J. Ion-plasma gun for ion-milling machine. United States.
Kaminsky, Manfred S, and Campana, Jr., Thomas J. Thu . "Ion-plasma gun for ion-milling machine". United States. https://www.osti.gov/servlets/purl/862721.
@article{osti_862721,
title = {Ion-plasma gun for ion-milling machine},
author = {Kaminsky, Manfred S and Campana, Jr., Thomas J.},
abstractNote = {An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat electrode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1976},
month = {1}
}

Patent:

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