Ion-plasma gun for ion-milling machine
Abstract
An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat electrode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.
- Inventors:
-
- Hinsdale, IL
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 862721
- Patent Number(s):
- US 3995186
- Assignee:
- United States of America as represented by United States Energy (Washington, DC)
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- ion-plasma; gun; ion-milling; machine; elongated; electrode; hollow; portion; closed; perforated; plate; positioned; parallel; flat; opposite; electrical; polarity; insulated; sleeve; encompasses; extends; outwardly; towards; length; separated; portions; materials; formed; high-temperature; material; initiated; source; extending; remainder; resilient; enhanced; seal-forming; ability; retention; plasma; gas; perforations; arranged; mutually; opposing; triangular; pattern; beam; current; profile; target; requiring; precision; milling; temperature material; plasma gas; plasma gun; positioned parallel; extends outwardly; elongated electrode; hollow portion; portion extending; resilient material; opposite electrical; extends outward; milling machine; sleeve portion; /313/219/
Citation Formats
Kaminsky, Manfred S, and Campana, Jr., Thomas J. Ion-plasma gun for ion-milling machine. United States: N. p., 1976.
Web.
Kaminsky, Manfred S, & Campana, Jr., Thomas J. Ion-plasma gun for ion-milling machine. United States.
Kaminsky, Manfred S, and Campana, Jr., Thomas J. 1976.
"Ion-plasma gun for ion-milling machine". United States. https://www.osti.gov/servlets/purl/862721.
@article{osti_862721,
title = {Ion-plasma gun for ion-milling machine},
author = {Kaminsky, Manfred S and Campana, Jr., Thomas J.},
abstractNote = {An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat electrode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.},
doi = {},
url = {https://www.osti.gov/biblio/862721},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 1976},
month = {Thu Jan 01 00:00:00 EST 1976}
}