Semiconductor films on flexible iridium substrates
Abstract
A laminate semiconductor article includes a flexible substrate, an optional biaxially textured oxide buffer system on the flexible substrate, a biaxially textured Ir-based buffer layer on the substrate or the buffer system, and an epitaxial layer of a semiconductor. Ir can serve as a substrate with an epitaxial layer of a semiconductor thereon.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175296
- Patent Number(s):
- 6872988
- Application Number:
- 10/808,815
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Goyal, Amit. Semiconductor films on flexible iridium substrates. United States: N. p., 2005.
Web.
Goyal, Amit. Semiconductor films on flexible iridium substrates. United States.
Goyal, Amit. Tue .
"Semiconductor films on flexible iridium substrates". United States. https://www.osti.gov/servlets/purl/1175296.
@article{osti_1175296,
title = {Semiconductor films on flexible iridium substrates},
author = {Goyal, Amit},
abstractNote = {A laminate semiconductor article includes a flexible substrate, an optional biaxially textured oxide buffer system on the flexible substrate, a biaxially textured Ir-based buffer layer on the substrate or the buffer system, and an epitaxial layer of a semiconductor. Ir can serve as a substrate with an epitaxial layer of a semiconductor thereon.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 29 00:00:00 EST 2005},
month = {Tue Mar 29 00:00:00 EST 2005}
}
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Works referenced in this record:
Diamond nucleation on iridium buffer layers and subsequent textured growth: A route for the realization of single-crystal diamond films
journal, January 2001
- Schreck, M.; Hörmann, F.; Roll, H.
- Applied Physics Letters, Vol. 78, Issue 2