skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates

Abstract

The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.

Inventors:
; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1169084
Patent Number(s):
8946683
Application Number:
12/996,924
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
FG02-07ER46471
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Rogers, John A, Cao, Qing, Alam, Muhammad, and Pimparkar, Ninad. Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates. United States: N. p., 2015. Web.
Rogers, John A, Cao, Qing, Alam, Muhammad, & Pimparkar, Ninad. Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates. United States.
Rogers, John A, Cao, Qing, Alam, Muhammad, and Pimparkar, Ninad. Tue . "Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates". United States. https://www.osti.gov/servlets/purl/1169084.
@article{osti_1169084,
title = {Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates},
author = {Rogers, John A and Cao, Qing and Alam, Muhammad and Pimparkar, Ninad},
abstractNote = {The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {2}
}

Patent:

Save / Share:

Works referenced in this record:

Aligned growth of isolated single-walled carbon nanotubes programmed by atomic arrangement of substrate surface
journal, June 2005


Synthesis of horizontally-aligned single-walled carbon nanotubes with controllable density on sapphire surface and polarized Raman spectroscopy
journal, April 2006


Silicon motherboards for multichannel optical modules
journal, March 1996

  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40
  • https://doi.org/10.1109/95.486559

Self-aligned self-assembly process for fabricating organic thin-film transistors
journal, September 2004


Microassembly of semiconductor three-dimensional photonic crystals
journal, January 2003


Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP)
journal, January 2005


High-Performance Plastic Transistors Fabricated by Printing Techniques
journal, June 1997


Adherence, friction and wear of rubber-like materials
journal, October 1992


Tailored Micropatterns through Weak Polyelectrolyte Stamping
journal, March 2003


Printing Patterns of Proteins
journal, April 1998


Conformal contact and pattern stability of stamps used for soft lithography
journal, June 2000


Large area, high resolution, dry printing of conducting polymers for organic electronics
journal, January 2003


The computer aided manufacture of ceramics using multilayer jet printing
journal, January 1995


Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer
journal, November 1999


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


Flexible Nanotube Electronics
journal, October 2003


Microporous materials: Electrochemically grown photonic crystals
journal, December 1999


Curing studies of a polyimide precursor. II. Polyamic acid
journal, September 1987


Patterning organic single-crystal transistor arrays
journal, December 2006


High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film
journal, July 2001


Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
journal, August 2005

  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787
  • https://doi.org/10.1021/ja0523791

Large Area Submicrometer Contact Printing Using a Contact Aligner
journal, June 2000


Large Scale CVD Synthesis of Single-Walled Carbon Nanotubes
journal, August 1999


Printed Organic Semiconducting Devices
journal, July 2005


Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique
journal, May 2003


Electronic paper: Flexible active-matrix electronic ink display
journal, May 2003


Self-aligned carbon nanotube transistors with charge transfer doping
journal, March 2005


Large-scale and low-cost synthesis of single-walled carbon nanotubes by the catalytic pyrolysis of hydrocarbons
journal, June 1998


Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature
journal, February 2005


Purification and Characterization of Single-Wall Carbon Nanotubes (SWNTs) Obtained from the Gas-Phase Decomposition of CO (HiPco Process)
journal, September 2001


Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method
journal, November 2002


High-performance organic thin-film transistors with metal oxide/metal bilayer electrode
journal, November 2005


Silicon nanowire devices
journal, April 2000


Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
journal, August 1998


Organic single-crystal field-effect transistors
journal, May 2004


Carbon Nanotube Inter- and Intramolecular Logic Gates
journal, September 2001


Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
journal, March 2003


Chromatographic size separation of single-wall carbon nanotubes
journal, July 1998


Polarized Raman Spectroscopy on Isolated Single-Wall Carbon Nanotubes
journal, December 2000


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


Wafer-level in-registry microstamping
journal, March 1999


Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes
journal, October 2004


Flexible a-Si:H Position-Sensitive Detectors
journal, July 2005


Nanometer-scale crystallization of thin HfO2 films studied by HF-chemical etching
journal, May 2005


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films
journal, January 2002


Fabrication of Metal Nanowires Using Microcontact Printing
journal, July 2003


High-performance all-polymer integrated circuits
journal, September 2000


Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure
journal, December 2002


Applications
book, January 1991


Field-effect mobility of amorphous silicon thin-film transistors under strain
journal, June 2004


Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999


Metal–insulator–semiconductor electrostatics of carbon nanotubes
journal, August 2002


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Low-voltage organic transistors with an amorphous molecular gate dielectric
journal, October 2004


Field-Effect Mobility of Organic Polymer Thin-Film Transistors
journal, October 2004


Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
journal, September 2001


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


A new purification method for single-wall carbon nanotubes (SWNTs)
journal, May 2000


Collapse of stamps for soft lithography due to interfacial adhesion
journal, April 2005


Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997


Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates
journal, May 2003


Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition
journal, October 2004


Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions
journal, August 2004


Stamp Collapse in Soft Lithography
journal, August 2005


Ordering of Spontaneously Formed Buckles on Planar Surfaces
journal, April 2000


Guided molecular self-assembly: a review of recent efforts
journal, March 2003


Plastic transistors in active-matrix displays
journal, December 2001


Printed thin-film transistors and complementary logic gates that use polymer-coated single-walled carbon nanotube networks
journal, December 2005


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Extreme bendability of single-walled carbon nanotube networks transferred from high-temperature growth substrates to plastic and their use in thin-film transistors
journal, June 2005


Measurement of the quantum capacitance of interacting electrons in carbon nanotubes
journal, September 2006


Screen printing for the fabrication of organic light-emitting devices
journal, January 2001


Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing
journal, February 1998


Low-voltage and high-field-effect mobility organic transistors with a polymer insulator
journal, February 2006


High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts
journal, February 2005


Preparation of Macroporous Metal Films from Colloidal Crystals
journal, September 1999


Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
journal, April 2002


Scalable Interconnection and Integration of Nanowire Devices without Registration
journal, May 2004


Patterning organic–inorganic thin-film transistors using microcontact printed templates
journal, November 2001


Analog and digital circuits using organic thin-film transistors on polyester substrates
journal, November 2000


Printed Multilayer Superstructures of Aligned Single-Walled Carbon Nanotubes for Electronic Applications
journal, November 2007


Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
journal, October 2004


Finer features for functional microdevices
journal, August 2001


Lateral growth of single wall carbon nanotubes on various substrates by means of an “all-laser” synthesis approach
journal, April 2006


Nanolithography based on patterned metal transfer and its application to organic electronic devices
journal, May 2002


Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
journal, January 2008


Fabrication of periodic nanostructures by phase-controlled multiple-beam interference
journal, December 2003


Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
journal, January 2003


Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation
journal, December 2004


Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
journal, April 2006


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
journal, August 2002


Percolating Conduction in Finite Nanotube Networks
journal, August 2005


Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
journal, August 2004


Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes
journal, April 2004


High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
journal, January 2003


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


High-Resolution Contact Printing with Dendrimers
journal, April 2002


Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
journal, October 2003


Growth of Single-Walled Carbon Nanotubes from Discrete Catalytic Nanoparticles of Various Sizes
journal, November 2001


Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors
journal, October 2004


Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002


Interfacial Chemistries for Nanoscale Transfer Printing
journal, July 2002


Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
journal, July 2002


Electrical Contacts to Molecular Layers by Nanotransfer Printing
journal, July 2003


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


Architectonic Quantum Dot Solids
journal, January 1999


Conducting elastomer surface texturing: a path to electrode spotting
journal, September 2004


Nanowire Arrays Defined by Nanoimprint Lithography
journal, April 2004


Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
journal, November 2005


High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
journal, November 2003


High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
journal, July 2005


Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
journal, December 1971


Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
journal, September 2004


A printable form of silicon for high performance thin film transistors on plastic substrates
journal, June 2004


Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing
journal, August 2004


Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
journal, January 1994


On the aging of oxygen plasma-treated polydimethylsiloxane surfaces
journal, June 1990


Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes
journal, March 2005


Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998


Nerve agent detection using networks of single-walled carbon nanotubes
journal, November 2003


Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale
journal, May 2004


High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
journal, March 2004


Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
journal, August 2005


Sharp exciton emission from single InAs quantum dots in GaAs nanowires
journal, September 2003


Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
journal, June 1998


Performance assessment of sub-percolating nanobundle network transistors by an analytical model
conference, January 2005


Theory and practice of “Striping” for improved ON/OFF Ratio in carbon nanonet thin film transistors
journal, February 2009


Ultrathin epitaxial germanium on crystalline oxide metal-oxide-semiconductor-field-effect transistors
journal, May 2005


Drain voltage scaling in carbon nanotube transistors
journal, September 2003


Nanotube electronics: Large-scale assembly of carbon nanotubes
journal, September 2003


High-power laser diodes based on InGaAsP alloys
journal, June 1994


Large-scale purification of single-wall carbon nanotubes: process, product, and characterization
journal, July 1998


Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
journal, May 1997


Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers
journal, September 1998


Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Printed plastic electronics and paperlike displays
journal, August 2002


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
journal, June 2003


Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
journal, August 2005


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


Percolation and conductivity: A computer study. II
journal, August 1974


High-Current Nanotube Transistors
journal, May 2004


Bending experiment on pentacene field-effect transistors on plastic films
journal, February 2005


A large-area wireless power-transmission sheet using printed organic transistors and plastic MEMS switches
journal, April 2007


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Holographic photonic crystals with diamond symmetry
journal, November 2003


Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates
journal, February 2002


Insights on Charge Transfer Doping and Intrinsic Phonon Line Shape of Carbon Nanotubes by Simple Polymer Adsorption
journal, June 2006


Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004


An analytical back-gate bias effect model for ultrathin SOI CMOS devices
journal, April 1993


Random networks of carbon nanotubes as an electronic material
journal, March 2003


High-mobility carbon-nanotube thin-film transistors on a polymeric substrate
journal, January 2005


Nanotube Optoelectronic Memory Devices
journal, September 2004


Lattice-Oriented Growth of Single-Walled Carbon Nanotubes
journal, July 2000


Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004


Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates
journal, August 2005


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


Photonic Band Gap Architectures for Holographic Lithography
journal, January 2004


Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003


Porous silica via colloidal crystallization
journal, October 1997


Theory of the field-effect mobility in amorphous organic transistors
journal, May 1998


Cheap and cheerful circuits
journal, September 2000


A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
journal, December 2003


Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses
journal, August 2005


A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
journal, January 2004


Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes
journal, May 2002


Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
journal, June 2001


Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
journal, December 2002


Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
journal, October 2003


High-mobility thin-film transistors based on aligned carbon nanotubes
journal, July 2003


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
journal, July 2005


Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003


Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps
journal, February 2003


Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003


Electric-field-directed growth of aligned single-walled carbon nanotubes
journal, November 2001


CVD synthesis and purification of single-walled carbon nanotubes on aerogel-supported catalyst
journal, March 2002


Shape-and-solder-directed self-assembly to package semiconductor device segments
journal, October 2004


p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004


Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors
journal, September 2005


Charge Pumping in Carbon Nanotubes
journal, December 2005


Intermetallic formation in gold-aluminum systems
journal, October 1970


Microscopic patterning of orientated mesoscopic silica through guided growth
journal, December 1997