Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures
Abstract
A method of using sacrificial materials for fabricating internal cavities and channels in laminated dielectric structures, which can be used as dielectric substrates and package mounts for microelectronic and microfluidic devices. A sacrificial mandrel is placed in-between two or more sheets of a deformable dielectric material (e.g., unfired LTCC glass/ceramic dielectric), wherein the sacrificial mandrel is not inserted into a cutout made in any of the sheets. The stack of sheets is laminated together, which deforms the sheet or sheets around the sacrificial mandrel. After lamination, the mandrel is removed, (e.g., during LTCC burnout), thereby creating a hollow internal cavity in the monolithic ceramic structure.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 960215
- Patent Number(s):
- 7494557
- Application Number:
- 10/768,329
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Peterson, Kenneth A. Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures. United States: N. p., 2009.
Web.
Peterson, Kenneth A. Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures. United States.
Peterson, Kenneth A. Tue .
"Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures". United States. https://www.osti.gov/servlets/purl/960215.
@article{osti_960215,
title = {Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures},
author = {Peterson, Kenneth A},
abstractNote = {A method of using sacrificial materials for fabricating internal cavities and channels in laminated dielectric structures, which can be used as dielectric substrates and package mounts for microelectronic and microfluidic devices. A sacrificial mandrel is placed in-between two or more sheets of a deformable dielectric material (e.g., unfired LTCC glass/ceramic dielectric), wherein the sacrificial mandrel is not inserted into a cutout made in any of the sheets. The stack of sheets is laminated together, which deforms the sheet or sheets around the sacrificial mandrel. After lamination, the mandrel is removed, (e.g., during LTCC burnout), thereby creating a hollow internal cavity in the monolithic ceramic structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 24 00:00:00 EST 2009},
month = {Tue Feb 24 00:00:00 EST 2009}
}
Works referenced in this record:
Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)
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- Gongora-Rubio, M. R.; Espinoza-Vallejos, P.; Sola-Laguna, L.
- Sensors and Actuators A: Physical, Vol. 89, Issue 3