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Title: Method and apparatus for thickness measurement using microwaves

Abstract

The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.

Inventors:
 [1];  [2]
  1. Bedford, MA
  2. West Richland, WA
Issue Date:
Research Org.:
Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
873592
Patent Number(s):
6198293
Application Number:
09/048,595
Assignee:
Massachusetts Institute of Technology (Cambridge, MA) PNNL
DOE Contract Number:  
AC06-76RL01830
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; apparatus; thickness; measurement; microwaves; measuring; material; transmits; detectable; amount; microwave; radiation; irradiating; coherent; tuned; frequency; range; reflected; detected; maxima; minima; result; interference; reflecting; surfaces; determined; period; knowledge; index; refraction; reflected radiation; reflecting surfaces; microwave radiation; reflecting surface; frequency range; waves reflected; thickness measurement; coherent microwave; reflected microwave; detectable amount; /324/

Citation Formats

Woskov, Paul, and Lamar, David A. Method and apparatus for thickness measurement using microwaves. United States: N. p., 2001. Web.
Woskov, Paul, & Lamar, David A. Method and apparatus for thickness measurement using microwaves. United States.
Woskov, Paul, and Lamar, David A. Mon . "Method and apparatus for thickness measurement using microwaves". United States. https://www.osti.gov/servlets/purl/873592.
@article{osti_873592,
title = {Method and apparatus for thickness measurement using microwaves},
author = {Woskov, Paul and Lamar, David A},
abstractNote = {The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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