Method and apparatus for thickness measurement using microwaves
Abstract
The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.
- Inventors:
-
- Bedford, MA
- West Richland, WA
- Issue Date:
- Research Org.:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 873592
- Patent Number(s):
- 6198293
- Application Number:
- 09/048,595
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC06-76RL01830
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; apparatus; thickness; measurement; microwaves; measuring; material; transmits; detectable; amount; microwave; radiation; irradiating; coherent; tuned; frequency; range; reflected; detected; maxima; minima; result; interference; reflecting; surfaces; determined; period; knowledge; index; refraction; reflected radiation; reflecting surfaces; microwave radiation; reflecting surface; frequency range; waves reflected; thickness measurement; coherent microwave; reflected microwave; detectable amount; /324/
Citation Formats
Woskov, Paul, and Lamar, David A. Method and apparatus for thickness measurement using microwaves. United States: N. p., 2001.
Web.
Woskov, Paul, & Lamar, David A. Method and apparatus for thickness measurement using microwaves. United States.
Woskov, Paul, and Lamar, David A. Mon .
"Method and apparatus for thickness measurement using microwaves". United States. https://www.osti.gov/servlets/purl/873592.
@article{osti_873592,
title = {Method and apparatus for thickness measurement using microwaves},
author = {Woskov, Paul and Lamar, David A},
abstractNote = {The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
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