Apparatus and method to measure semiconductor optical absorption using microwave charge sensing

Patent · Tue Sep 21 00:00:00 EDT 2021

OSTI ID:1840472

Shaner, Eric A.; Goldflam, Michael; Kadlec, Clark N.

A time-resolved microwave reflectance apparatus comprises a pulsed or modulated optical source that irradiates a semiconductor sample with an excitation pump beam, a microwave oscillator that irradiates the sample with a continuous beam of microwaves, and a microwave detector that detects the microwaves reflected by the sample. Therefore, charge detection, rather than conventional absorption measurements (that detect the loss of photons), can be used to extract the absorption coefficient and band edge of a semiconductor material.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: NA0003525
• Assignee: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
• Patent Number(s): 11,125,700
• Application Number: 16/543,891
• OSTI ID: 1840472
• Resource Relation: Patent File Date: 08/19/2019
• Country of Publication: United States
• Language: English