Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits
Abstract
A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.
- Inventors:
-
- 13170-B Central SE #188, Albuquerque, NM 87123
- 2800 Tennessee NE, Albuquerque, NM 87110
- (2116 White Cloud NE, Albuquerque, NM 87112)
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); American Telephone and Telegraph Company
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 870148
- Patent Number(s):
- 5465046
- Assignee:
- Campbell, Ann. N. (13170-B Central SE #188, Albuquerque, NM 87123);Anderson, Richard E. (2800 Tennessee NE, Albuquerque, NM 87110);Cole, Jr., Edward I. (2116 White Cloud NE, Albuquerque, NM 87112)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
- DOE Contract Number:
- AC04-76DP00789; AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- magnetic; force; microscopy; method; apparatus; detect; image; currents; integrated; circuits; improved; tip; detecting; quantifying; internal; fields; resulting; current; detection; failure; analysis; design; verification; model; validation; interaction; chip; field; detected; cantilevered; enhanced; sensitivity; dc; voltage; achieved; coupling; heterodyne; technique; techniques; extract; information; analog; enhanced sensitivity; magnetic force; magnetic field; magnetic fields; integrated circuits; integrated circuit; failure analysis; dc current; analog circuit; microscopy method; force microscopy; heterodyne technique; improved magnetic; image currents; /324/
Citation Formats
Campbell, Ann N, Anderson, Richard E, and Cole, Jr., Edward I. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States: N. p., 1995.
Web.
Campbell, Ann N, Anderson, Richard E, & Cole, Jr., Edward I. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States.
Campbell, Ann N, Anderson, Richard E, and Cole, Jr., Edward I. Sun .
"Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits". United States. https://www.osti.gov/servlets/purl/870148.
@article{osti_870148,
title = {Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits},
author = {Campbell, Ann N and Anderson, Richard E and Cole, Jr., Edward I.},
abstractNote = {A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1995},
month = {Sun Jan 01 00:00:00 EST 1995}
}
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