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Title: Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits are disclosed. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits. 17 figs.
Inventors:
; ;
Issue Date:
OSTI Identifier:
131914
Assignee:
SNL; SCA: 440800; 426000; PA: EDB-95:157952; SN: 95001485794
Patent Number(s):
US 5,465,046/A/
Application Number:
PAN: 8-215,431
Contract Number:
AC04-76DP00789; AC04-94AL85000
Resource Relation:
Other Information: PBD: 7 Nov 1995
Research Org:
AT&T Corporation; Sandia Corporation
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; ELECTRIC CURRENTS; MAGNETIC FIELDS; MICROSCOPES; DESIGN; ANALOG SYSTEMS; FAILURE MODE ANALYSIS; ELECTRIC POTENTIAL; MEASURING METHODS

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