Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits
Abstract
A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits are disclosed. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits. 17 figs.
- Inventors:
- Issue Date:
- Research Org.:
- AT&T; Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 131914
- Patent Number(s):
- 5465046
- Application Number:
- PAN: 8-215,431
- Assignee:
- SNL; SCA: 440800; 426000; PA: EDB-95:157952; SN: 95001485794
- DOE Contract Number:
- AC04-76DP00789; AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 7 Nov 1995
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; ELECTRIC CURRENTS; MAGNETIC FIELDS; MICROSCOPES; DESIGN; ANALOG SYSTEMS; FAILURE MODE ANALYSIS; ELECTRIC POTENTIAL; MEASURING METHODS
Citation Formats
Campbell, A N, Anderson, R E, and Cole, Jr, E I. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States: N. p., 1995.
Web.
Campbell, A N, Anderson, R E, & Cole, Jr, E I. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States.
Campbell, A N, Anderson, R E, and Cole, Jr, E I. Tue .
"Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits". United States.
@article{osti_131914,
title = {Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits},
author = {Campbell, A N and Anderson, R E and Cole, Jr, E I},
abstractNote = {A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits are disclosed. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits. 17 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 07 00:00:00 EST 1995},
month = {Tue Nov 07 00:00:00 EST 1995}
}
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