skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method of making segmented pyrolytic graphite sputtering targets

Abstract

Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.

Inventors:
 [1];  [2];  [1];  [1]
  1. Livermore, CA
  2. Tracy, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
869148
Patent Number(s):
5284539
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; segmented; pyrolytic; graphite; sputtering; targets; anisotropic; wafers; oriented; bonded; thermal; conductivity; planes; maximized; surface; target; allow; optimum; heat; conduction; sputter; maximum; energy; transmission; pyrolytic graphite; heat conduction; maximum energy; sputtering targets; thermal conductivity; sputter target; energy transmission; graphite sputtering; anisotropic pyrolytic; conductivity planes; /156/204/

Citation Formats

McKernan, Mark A, Alford, Craig S, Makowiecki, Daniel M, and Chen, Chih-Wen. Method of making segmented pyrolytic graphite sputtering targets. United States: N. p., 1994. Web.
McKernan, Mark A, Alford, Craig S, Makowiecki, Daniel M, & Chen, Chih-Wen. Method of making segmented pyrolytic graphite sputtering targets. United States.
McKernan, Mark A, Alford, Craig S, Makowiecki, Daniel M, and Chen, Chih-Wen. Sat . "Method of making segmented pyrolytic graphite sputtering targets". United States. https://www.osti.gov/servlets/purl/869148.
@article{osti_869148,
title = {Method of making segmented pyrolytic graphite sputtering targets},
author = {McKernan, Mark A and Alford, Craig S and Makowiecki, Daniel M and Chen, Chih-Wen},
abstractNote = {Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent:

Save / Share: