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Title: Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets

An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.
Inventors:
 [1];  [1];  [2]
  1. (Livermore, CA)
  2. (Hayward, CA)
Issue Date:
OSTI Identifier:
869955
Assignee:
Regents of University of California (Oakland, CA) LLNL
Patent Number(s):
US 5428882
Contract Number:
W-7405-ENG-48
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
Language:
English
Subject:
process; fabrication; aluminum; metallized; pyrolytic; graphite; sputtering; targets; improved; method; fabricating; superior; heat; transfer; ability; life; maximum; energy; transmission; anisotropic; contoured; segmented; match; erosion; profile; sputter; target; oriented; thermal; conductivity; planes; contact; thermally; conductive; metal; surface; rate; physical; vapor; deposition; hrpvd; coating; joined; low-temperature; bonding; methods; liquid-metal; casting; powder; metallurgy; compaction; eutectic; brazing; laser; welding; pyrolytic graphite; metal casting; maximum energy; sputtering targets; laser welding; contact surface; improved method; thermal conductivity; heat transfer; vapor deposition; physical vapor; thermally conductive; conductive metal; sputter target; aluminum metal; powder metallurgy; laser weld; energy transmission; graphite sputtering; superior heat; graphite contact; temperature bonding; anisotropic pyrolytic; conductivity planes; /29/156/204/219/228/419/427/