Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets

Makowiecki, Daniel M; Ramsey, Philip B; Juntz, Robert S

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Title: Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets

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Abstract

An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.

Inventors:

Makowiecki, Daniel M ^[1]; Ramsey, Philip B ^[1]; Juntz, Robert S ^[2]

Livermore, CA
Hayward, CA

Issue Date:: 1995-01-01

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

OSTI Identifier:: 869955

Patent Number(s):: 5428882

Assignee:: Regents of University of California (Oakland, CA)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/18 - on other inorganic substrates
C23C14/3407 - {Cathode assembly for sputtering apparatus, e.g. Target}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/3491 - {Manufacturing of targets}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/49885 - with coating before or during assembling
Y10T29/49982 - Coating
Y10T29/49988 - Metal casting

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: process; fabrication; aluminum; metallized; pyrolytic; graphite; sputtering; targets; improved; method; fabricating; superior; heat; transfer; ability; life; maximum; energy; transmission; anisotropic; contoured; segmented; match; erosion; profile; sputter; target; oriented; thermal; conductivity; planes; contact; thermally; conductive; metal; surface; rate; physical; vapor; deposition; hrpvd; coating; joined; low-temperature; bonding; methods; liquid-metal; casting; powder; metallurgy; compaction; eutectic; brazing; laser; welding; pyrolytic graphite; metal casting; maximum energy; sputtering targets; laser welding; contact surface; improved method; thermal conductivity; heat transfer; vapor deposition; physical vapor; thermally conductive; conductive metal; sputter target; aluminum metal; powder metallurgy; laser weld; energy transmission; graphite sputtering; superior heat; graphite contact; temperature bonding; anisotropic pyrolytic; conductivity planes; /29/156/204/219/228/419/427/

Citation Formats


                    Makowiecki, Daniel M, Ramsey, Philip B, and Juntz, Robert S. Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets.  United States: N. p., 1995. 
        Web.

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                    Makowiecki, Daniel M, Ramsey, Philip B, & Juntz, Robert S. Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets.  United States.

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                    Makowiecki, Daniel M, Ramsey, Philip B, and Juntz, Robert S. Sun .  
        "Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets".  United States.  https://www.osti.gov/servlets/purl/869955.

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@article{osti_869955,

  title        = {Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets},

  author       = {Makowiecki, Daniel M and Ramsey, Philip B and Juntz, Robert S},

  abstractNote = {An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {1}

}

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Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets

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