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Title: Method for the preparation of nanocrystalline diamond thin films

Abstract

A method and system are disclosed for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip. 40 figs.

Inventors:
;
Issue Date:
Research Org.:
Univ. of Chicago, IL (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
672601
Patent Number(s):
5772760
Application Number:
PAN: 8-540,916
Assignee:
Univ. of Chicago, IL (United States)
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 30 Jun 1998
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; CHEMICAL VAPOR DEPOSITION; DIAMONDS; GRAIN SIZE; SUBSTRATES; FIELD EMISSION

Citation Formats

Gruen, D M, and Krauss, A R. Method for the preparation of nanocrystalline diamond thin films. United States: N. p., 1998. Web.
Gruen, D M, & Krauss, A R. Method for the preparation of nanocrystalline diamond thin films. United States.
Gruen, D M, and Krauss, A R. Tue . "Method for the preparation of nanocrystalline diamond thin films". United States.
@article{osti_672601,
title = {Method for the preparation of nanocrystalline diamond thin films},
author = {Gruen, D M and Krauss, A R},
abstractNote = {A method and system are disclosed for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip. 40 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {6}
}