Method for the preparation of nanocrystalline diamond thin films
Abstract
A method and system are disclosed for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip. 40 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Chicago, IL (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 672601
- Patent Number(s):
- 5772760
- Application Number:
- PAN: 8-540,916
- Assignee:
- Univ. of Chicago, IL (United States)
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 30 Jun 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; CHEMICAL VAPOR DEPOSITION; DIAMONDS; GRAIN SIZE; SUBSTRATES; FIELD EMISSION
Citation Formats
Gruen, D M, and Krauss, A R. Method for the preparation of nanocrystalline diamond thin films. United States: N. p., 1998.
Web.
Gruen, D M, & Krauss, A R. Method for the preparation of nanocrystalline diamond thin films. United States.
Gruen, D M, and Krauss, A R. Tue .
"Method for the preparation of nanocrystalline diamond thin films". United States.
@article{osti_672601,
title = {Method for the preparation of nanocrystalline diamond thin films},
author = {Gruen, D M and Krauss, A R},
abstractNote = {A method and system are disclosed for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip. 40 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 30 00:00:00 EDT 1998},
month = {Tue Jun 30 00:00:00 EDT 1998}
}
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