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Title: Method for the preparation of nanocrystalline diamond thin films

Abstract

A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.

Inventors:
 [1];  [2]
  1. Downers Grove, IL
  2. Naperville, IL
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
OSTI Identifier:
871657
Patent Number(s):
5772760
Assignee:
University Of Chicago (Chicago, IL)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; preparation; nanocrystalline; diamond; films; manufacturing; film; substrate; field; emission; tips; involves; forming; carbonaceous; vapor; providing; gas; stream; argon; hydrocarbon; possibly; hydrogen; combining; passing; combined; carrier; chamber; plasma; causing; fragmentation; deposition; tip; method involves; gas stream; field emission; diamond film; involves forming; carbonaceous vapor; carrier stream; causing fragmentation; chamber causing; nanocrystalline diamond; method involve; gas carrier; emission tips; /117/427/

Citation Formats

Gruen, Dieter M, and Krauss, Alan R. Method for the preparation of nanocrystalline diamond thin films. United States: N. p., 1998. Web.
Gruen, Dieter M, & Krauss, Alan R. Method for the preparation of nanocrystalline diamond thin films. United States.
Gruen, Dieter M, and Krauss, Alan R. Tue . "Method for the preparation of nanocrystalline diamond thin films". United States. https://www.osti.gov/servlets/purl/871657.
@article{osti_871657,
title = {Method for the preparation of nanocrystalline diamond thin films},
author = {Gruen, Dieter M and Krauss, Alan R},
abstractNote = {A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {6}
}

Works referenced in this record:

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Fullerenes
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Diamond Film Semiconductors
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Fabrication and Characterization of Diamond-Clad Silicon Field Emitter Arrays
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Solid C60: a new form of carbon
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