Method of improving field emission characteristics of diamond thin films
Abstract
A method of preparing diamond thin films with improved field emission properties is disclosed. The method includes preparing a diamond thin film on a substrate, such as Mo, W, Si and Ni. An atmosphere of hydrogen (molecular or atomic) can be provided above the already deposited film to form absorbed hydrogen to reduce the work function and enhance field emission properties of the diamond film. In addition, hydrogen can be absorbed on intergranular surfaces to enhance electrical conductivity of the diamond film. The treated diamond film can be part of a microtip array in a flat panel display. 3 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Chicago, IL (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 350330
- Patent Number(s):
- 5902640
- Application Number:
- PAN: 8-684,426
- Assignee:
- Univ. of Chicago, IL (United States)
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 11 May 1999
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; DIAMONDS; FIELD EMISSION; SUBSTRATES; MOLYBDENUM; TUNGSTEN; SILICON; NICKEL; WORK FUNCTIONS; ELECTRIC CONDUCTIVITY; DISPLAY DEVICES; FABRICATION; ABSORPTION; HYDROGEN
Citation Formats
Krauss, A R, and Gruen, D M. Method of improving field emission characteristics of diamond thin films. United States: N. p., 1999.
Web.
Krauss, A R, & Gruen, D M. Method of improving field emission characteristics of diamond thin films. United States.
Krauss, A R, and Gruen, D M. Tue .
"Method of improving field emission characteristics of diamond thin films". United States.
@article{osti_350330,
title = {Method of improving field emission characteristics of diamond thin films},
author = {Krauss, A R and Gruen, D M},
abstractNote = {A method of preparing diamond thin films with improved field emission properties is disclosed. The method includes preparing a diamond thin film on a substrate, such as Mo, W, Si and Ni. An atmosphere of hydrogen (molecular or atomic) can be provided above the already deposited film to form absorbed hydrogen to reduce the work function and enhance field emission properties of the diamond film. In addition, hydrogen can be absorbed on intergranular surfaces to enhance electrical conductivity of the diamond film. The treated diamond film can be part of a microtip array in a flat panel display. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {5}
}