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Title: Method for producing high quality thin layer films on substrates

Abstract

A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.

Inventors:
; ;
Issue Date:
OSTI Identifier:
5113439
Patent Number(s):
5306530
Application Number:
PPN: US 7-980496
Assignee:
Associated Universities, Inc., Washington, DC (United States)
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Resource Relation:
Patent File Date: 23 Nov 1992
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; INORGANIC COMPOUNDS; CHEMICAL COATING; THIN FILMS; CHARGED PARTICLES; PHOTON BEAMS; PRECURSOR; BEAMS; DEPOSITION; FILMS; SURFACE COATING; 360601* - Other Materials- Preparation & Manufacture

Citation Formats

Strongin, M, Ruckman, M, and Strongin, D. Method for producing high quality thin layer films on substrates. United States: N. p., 1994. Web.
Strongin, M, Ruckman, M, & Strongin, D. Method for producing high quality thin layer films on substrates. United States.
Strongin, M, Ruckman, M, and Strongin, D. Tue . "Method for producing high quality thin layer films on substrates". United States.
@article{osti_5113439,
title = {Method for producing high quality thin layer films on substrates},
author = {Strongin, M and Ruckman, M and Strongin, D},
abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {4}
}