Method for producing high quality thin layer films on substrates
Abstract
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 5113439
- Patent Number(s):
- 5306530
- Application Number:
- PPN: US 7-980496
- Assignee:
- Associated Universities, Inc., Washington, DC (United States)
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 23 Nov 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; INORGANIC COMPOUNDS; CHEMICAL COATING; THIN FILMS; CHARGED PARTICLES; PHOTON BEAMS; PRECURSOR; BEAMS; DEPOSITION; FILMS; SURFACE COATING; 360601* - Other Materials- Preparation & Manufacture
Citation Formats
Strongin, M, Ruckman, M, and Strongin, D. Method for producing high quality thin layer films on substrates. United States: N. p., 1994.
Web.
Strongin, M, Ruckman, M, & Strongin, D. Method for producing high quality thin layer films on substrates. United States.
Strongin, M, Ruckman, M, and Strongin, D. Tue .
"Method for producing high quality thin layer films on substrates". United States.
@article{osti_5113439,
title = {Method for producing high quality thin layer films on substrates},
author = {Strongin, M and Ruckman, M and Strongin, D},
abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 26 00:00:00 EDT 1994},
month = {Tue Apr 26 00:00:00 EDT 1994}
}
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