Method for producing high quality thin layer films on substrates

Title: Method for producing high quality thin layer films on substrates

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Abstract

A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.

Inventors:

Strongin, Myron ^[1]; Ruckman, Mark ^[2]; Strongin, Daniel ^[3]

Center Moriches, NY
Middle Island, NY
Port Jefferson, NY

Issue Date:: 1994-01-01

Research Org.:: Associated Universities, Inc., Upton, NY (United States)

OSTI Identifier:: 869255

Patent Number(s):: 5306530

Assignee:: Associated Universities, Inc. (Washington, DC)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/487 - {using electron radiation}
C23C16/46 - characterised by the method used for heating the substrate
C23C16/485 - {using synchrotron radiation}
C23C16/486 - {using ion beam radiation}

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DOE Contract Number:: AC02-76CH00016

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: method; producing; quality; layer; films; substrates; inorganic; compounds; surface; substrate; disclosed; involves; condensing; mixture; preselected; molecular; precursors; subsequently; inducing; formation; reactive; species; energy; photon; charged; particle; irradiation; react; produce; film; desired; compound; inorganic compounds; organic compound; organic compounds; method involves; charged particle; reactive species; particle irradiation; energy photon; active species; method involve; layer films; /427/

Citation Formats


                    Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Method for producing high quality thin layer films on substrates.  United States: N. p., 1994. 
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                    Strongin, Myron, Ruckman, Mark, & Strongin, Daniel. Method for producing high quality thin layer films on substrates.  United States.

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                    Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Sat .  
        "Method for producing high quality thin layer films on substrates".  United States.  https://www.osti.gov/servlets/purl/869255.

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@article{osti_869255,

  title        = {Method for producing high quality thin layer films on substrates},

  author       = {Strongin, Myron and Ruckman, Mark and Strongin, Daniel},

  abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1994},

  month        = {1}

}

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