Method for producing high quality thin layer films on substrates
Abstract
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.
- Inventors:
-
- Center Moriches, NY
- Middle Island, NY
- Port Jefferson, NY
- Issue Date:
- Research Org.:
- Associated Universities, Inc., Upton, NY (United States)
- OSTI Identifier:
- 869255
- Patent Number(s):
- 5306530
- Assignee:
- Associated Universities, Inc. (Washington, DC)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; producing; quality; layer; films; substrates; inorganic; compounds; surface; substrate; disclosed; involves; condensing; mixture; preselected; molecular; precursors; subsequently; inducing; formation; reactive; species; energy; photon; charged; particle; irradiation; react; produce; film; desired; compound; inorganic compounds; organic compound; organic compounds; method involves; charged particle; reactive species; particle irradiation; energy photon; active species; method involve; layer films; /427/
Citation Formats
Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Method for producing high quality thin layer films on substrates. United States: N. p., 1994.
Web.
Strongin, Myron, Ruckman, Mark, & Strongin, Daniel. Method for producing high quality thin layer films on substrates. United States.
Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Sat .
"Method for producing high quality thin layer films on substrates". United States. https://www.osti.gov/servlets/purl/869255.
@article{osti_869255,
title = {Method for producing high quality thin layer films on substrates},
author = {Strongin, Myron and Ruckman, Mark and Strongin, Daniel},
abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}