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Title: Method for producing high quality thin layer films on substrates

Abstract

A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.

Inventors:
 [1];  [2];  [3]
  1. Center Moriches, NY
  2. Middle Island, NY
  3. Port Jefferson, NY
Issue Date:
Research Org.:
Associated Universities, Inc., Upton, NY (United States)
OSTI Identifier:
869255
Patent Number(s):
5306530
Assignee:
Associated Universities, Inc. (Washington, DC)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; producing; quality; layer; films; substrates; inorganic; compounds; surface; substrate; disclosed; involves; condensing; mixture; preselected; molecular; precursors; subsequently; inducing; formation; reactive; species; energy; photon; charged; particle; irradiation; react; produce; film; desired; compound; inorganic compounds; organic compound; organic compounds; method involves; charged particle; reactive species; particle irradiation; energy photon; active species; method involve; layer films; /427/

Citation Formats

Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Method for producing high quality thin layer films on substrates. United States: N. p., 1994. Web.
Strongin, Myron, Ruckman, Mark, & Strongin, Daniel. Method for producing high quality thin layer films on substrates. United States.
Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Sat . "Method for producing high quality thin layer films on substrates". United States. https://www.osti.gov/servlets/purl/869255.
@article{osti_869255,
title = {Method for producing high quality thin layer films on substrates},
author = {Strongin, Myron and Ruckman, Mark and Strongin, Daniel},
abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent:

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