MEMS metal-quartz gyroscope

Park, Sangtae; Pannu, Satinderpall S.

Title: MEMS metal-quartz gyroscope

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Abstract

The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.

Inventors:: Park, Sangtae; Pannu, Satinderpall S.

Issue Date:: 2021-01-26

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1805427

Patent Number(s):: 10900783

Application Number:: 16/008,793

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

DOE Contract Number:: AC52-07NA27344

Resource Type:: Patent

Resource Relation:: Patent File Date: 06/14/2018

Country of Publication:: United States

Language:: English

Citation Formats


                    Park, Sangtae, and Pannu, Satinderpall S. MEMS metal-quartz gyroscope.  United States: N. p., 2021. 
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                    Park, Sangtae, & Pannu, Satinderpall S. MEMS metal-quartz gyroscope.  United States.

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                    Park, Sangtae, and Pannu, Satinderpall S. Tue .  
        "MEMS metal-quartz gyroscope".  United States.  https://www.osti.gov/servlets/purl/1805427.

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@article{osti_1805427,

  title        = {MEMS metal-quartz gyroscope},

  author       = {Park, Sangtae and Pannu, Satinderpall S.},

  abstractNote = {The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2021},

  month        = {1}

}

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