Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

Title: Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

Abstract

A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

Inventors:: Lopez, Daniel; Wiederrecht, Gary; Gosztola, David J.; Mancini, Derrick C.

Issue Date:: 2017-01-17

Research Org.:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1339530

Patent Number(s):: 9548677

Application Number:: 14/565,737

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

G - PHYSICS G02 - OPTICS G02F - DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING

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G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B5/008 - {Surface plasmon devices

G - PHYSICS G02 - OPTICS G02F - DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING
G02F1/17 - based on variable-absorption elements not provided for in groups G02F1/015 - G02F1/169

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
H02N1/008 - {Laterally driven motors, e.g. of the comb-drive type}

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2201/02 - Mechanical
G01N21/658 - {enhancement Raman, e.g. surface plasmons}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T74/20354 - Planar surface with orthogonal movement only

B - PERFORMING OPERATIONS B25 - HAND TOOLS B25J - MANIPULATORS
B25J7/00 - Micromanipulators {

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T74/2036 - Pair of power elements

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 2014 Dec 10

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats


                    Lopez, Daniel, Wiederrecht, Gary, Gosztola, David J., and Mancini, Derrick C. Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions.  United States: N. p., 2017. 
        Web.

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                    Lopez, Daniel, Wiederrecht, Gary, Gosztola, David J., & Mancini, Derrick C. Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions.  United States.

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                    Lopez, Daniel, Wiederrecht, Gary, Gosztola, David J., and Mancini, Derrick C. Tue .  
        "Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions".  United States.  https://www.osti.gov/servlets/purl/1339530.

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@article{osti_1339530,

  title        = {Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions},

  author       = {Lopez, Daniel and Wiederrecht, Gary and Gosztola, David J. and Mancini, Derrick C.},

  abstractNote = {A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2017},

  month        = {1}

}

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Works referenced in this record:

Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus
patent, May 1998

Yasuda, Susumu; Yagi, Takayuki
US Patent Document 5,753,911
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5753911

Multistable tunable micromechanical resonators
patent, June 1999

Adams, Scott; Wang, Yongmei; Macdonald, Noel
US Patent Document 5,914,553
URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect2=PTO1&Sect2=HITOFF&p=1&u=/netahtml/PTO/search-bool.html&r=1&f=G&l=50&d=PALL&RefSrch=yes&Query=PN/5914553

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Title: Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

Abstract

Citation Formats

Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus patent, May 1998

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Multistable tunable micromechanical resonators
patent, June 1999