Microelectromechanical gyroscope
- Albuquerque, NM
A gyroscope powered by an engine, all fabricated on a common substrate in the form of an integrated circuit. Preferably, both the gyroscope and the engine are fabricated in the micrometer domain, although in some embodiments of the present invention, the gyroscope can be fabricated in the millimeter domain. The engine disclosed herein provides torque to the gyroscope rotor for continuous rotation at varying speeds and direction. The present invention is preferably fabricated of polysilicon or other suitable materials on a single wafer using surface micromachining batch fabrication techniques or millimachining techniques that are well known in the art. Fabrication of the present invention is preferably accomplished without the need for assembly of multiple wafers which require alignment and bonding, and without piece-part assembly.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 5994801
- OSTI ID:
- 872717
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
gyroscope
powered
engine
fabricated
common
substrate
form
integrated
circuit
preferably
micrometer
domain
embodiments
millimeter
disclosed
provides
torque
rotor
continuous
rotation
varying
speeds
direction
polysilicon
suitable
materials
single
wafer
surface
micromachining
batch
fabrication
techniques
millimachining
accomplished
assembly
multiple
wafers
require
alignment
bonding
piece-part
common substrate
suitable material
integrated circuit
fabrication techniques
surface micromachining
multiple wafers
suitable materials
varying speeds
micromachining batch
batch fabrication
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