Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory

Auciello, Orlando H.

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Title: Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory

Abstract

A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure that features an integrated large density array of nanotips made of wear-resistant conductive ultrananocrystalline diamond (UNCD) in which the tips are actuated via a piezoelectric thin film integrated with the UNCD tips. The tips of the special piezoactuated storage device effectively contact an underlying metal layer (top electrode) deposited on a polarizable ferroelectric layer that is grown on top of another metal layer (bottom electrode) to form a ferroelectric capacitor. Information is imprinted in the ferroelectric layer by the polarization induced by the application of a voltage pulse between the top and bottom electrodes through the conductive UNCD tips. This integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure can be efficiently used to imprint data in the ferroelectric layer for memory storage with high density in the gigabit (Gb) to terabit (Tb) range. An alternative memory media to the ferroelectric layer can be a phase change material that exhibits two orders of magnitude difference in electrical resistance between amorphous and crystalline phases.

Inventors:: Auciello, Orlando H.

Issue Date:: Tue Oct 13 00:00:00 EDT 2009

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531605

Patent Number(s):: 7602105

Application Number:: 11/789,344

Assignee:: UChicago Argonne, LLC (Argonne, IL)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

G - PHYSICS G11 - INFORMATION STORAGE G11C - STATIC STORES

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

G - PHYSICS G11 - INFORMATION STORAGE G11C - STATIC STORES
G11C11/22 - using ferroelectric elements {
G11C13/0004 - {comprising amorphous/crystalline phase transition cells}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T29/42 - Piezoelectric device making
Y10T29/49005 - Acoustic transducer
Y10T29/49146 - with encapsulating, e.g., potting, etc.
Y10T29/49156 - with selective destruction of conductive paths

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DOE Contract Number:: AC02-06CH11357; W-31-109-ENG-38

Resource Type:: Patent

Resource Relation:: Patent File Date: 2007-04-24

Country of Publication:: United States

Language:: English

Citation Formats


                    Auciello, Orlando H. Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory.  United States: N. p., 2009. 
        Web.

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                    Auciello, Orlando H. Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory.  United States.

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                    Auciello, Orlando H. Tue .  
        "Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory".  United States.  https://www.osti.gov/servlets/purl/1531605.

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@article{osti_1531605,

  title        = {Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory},

  author       = {Auciello, Orlando H.},

  abstractNote = {A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure that features an integrated large density array of nanotips made of wear-resistant conductive ultrananocrystalline diamond (UNCD) in which the tips are actuated via a piezoelectric thin film integrated with the UNCD tips. The tips of the special piezoactuated storage device effectively contact an underlying metal layer (top electrode) deposited on a polarizable ferroelectric layer that is grown on top of another metal layer (bottom electrode) to form a ferroelectric capacitor. Information is imprinted in the ferroelectric layer by the polarization induced by the application of a voltage pulse between the top and bottom electrodes through the conductive UNCD tips. This integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure can be efficiently used to imprint data in the ferroelectric layer for memory storage with high density in the gigabit (Gb) to terabit (Tb) range. An alternative memory media to the ferroelectric layer can be a phase change material that exhibits two orders of magnitude difference in electrical resistance between amorphous and crystalline phases.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Oct 13 00:00:00 EDT 2009},

  month        = {Tue Oct 13 00:00:00 EDT 2009}

}

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Works referenced in this record:

Ferroelectric Record Carrier, Its Method of Manufacture and Micro-Tip Recording System Incorporating Same
patent-application, May 2009

Gidon, Serge
US Patent Application 12/262655; 20090116367
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Apparatus and method for a ferroelectric disk and ferroelectric disk drive
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Strom, Brian D.
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Diamond AFM probe with piezoelectric sensor and actuator
conference, January 2003

Shibata, T.; Unno, K.; Makino, E.
IEEE International Solid-State Sensors and Actuators Conference, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
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Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
patent, September 2003

Krauss, Alan R.; Gruen, Dieter M.; Pellin, Michael J.
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Novel ultrananocrystalline diamond probes for high-resolution low-wear nanolithographic techniques
patent-application, September 2007

Sumant, Anirudha; Carpick, Robert; Auciello, Orlando
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Electronic device and electronic apparatus
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Works referencing / citing this record:

Low-stress doped ultrananocrystalline diamond
patent, October 2016

Sumant, Anirudha V.; Buja, Federico; van Spengen, Willem Merlijn
US Patent Document 9,475,690
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9475690

Materials and methods for the preparation of nanocomposites
patent, January 2018

Nag, Angshuman; Talapin, Dmitri V.
US Patent Document 9,882,001
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9882001

Piezoelectric actuator and method for producing a piezoelectric actuator
patent, August 2012

Dorner-Reisel, Annett
US Patent Document 8,237,333
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8237333

NEMS devices with series ferroelectric negative capacitor
patent, September 2017

Alam, Muhammad Ashraful; Masuduzzaman, Muhammad; Jain, Ankit
US Patent Document 9,755,041
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9755041

Materials and methods for the preparation of nanocomposites
patent, November 2018

Talapin, Dmitri V.; Kovalenko, Maksym V.; Lee, Jong Soo
US Patent Document 10,121,952
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/10121952

Integration of dissimilar materials for advanced multifunctional devices
patent, September 2010

Auciello, Orlando H.; Carlisle, John; Gerbi, Jennifer E.
US Patent Document 7,791,201
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7791201

Materials and methods for the preparation of nanocomposites
patent, May 2016

Talapin, Dmitri V.; Kovalenko, Maksym V.; Lee, Jong Soo
US Patent Document 9,346,998
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9346998

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Similar Records

Title: Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory

Abstract

Citation Formats

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Materials and methods for the preparation of nanocomposites patent, November 2018

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