Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond
Abstract
A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 10.sup.12 to about 10.sup.14 emitting sites per cm.sup.2. A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1295657
- Patent Number(s):
- 9418814
- Application Number:
- 14/594,949
- Assignee:
- UCHICAGO ARGONNE, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC02-06CH11357; SC0009572
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Jan 12
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Sumant, Anirudha V., Baryshev, Sergey V., and Antipov, Sergey P. Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond. United States: N. p., 2016.
Web.
Sumant, Anirudha V., Baryshev, Sergey V., & Antipov, Sergey P. Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond. United States.
Sumant, Anirudha V., Baryshev, Sergey V., and Antipov, Sergey P. Tue .
"Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond". United States. https://www.osti.gov/servlets/purl/1295657.
@article{osti_1295657,
title = {Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond},
author = {Sumant, Anirudha V. and Baryshev, Sergey V. and Antipov, Sergey P.},
abstractNote = {A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 10.sup.12 to about 10.sup.14 emitting sites per cm.sup.2. A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {8}
}
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