Flexure-based, tip-tilt-piston actuation micro-array

Hopkins, Jonathan; Panas, Robert Matthew

Title: Flexure-based, tip-tilt-piston actuation micro-array

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Abstract

A flexure-based micro-array having a plurality of micro-assemblies, each comprising: an object; and at least three electrostatic actuation modules for tipping, tilting, and/or piston-actuating the object, each actuation module comprising: a base with first and second electrodes electrically isolated from each other; an electrically conductive lever arm; a first flexure bearing suspending the lever arm adjacent the first and second electrodes so that electrical activation of at least one of the first and second electrodes produces an electrostatic moment of force on the lever arm to resiliently bias the first flexure bearing and pivot the lever arm about a fulcrum; and a second flexure bearing connecting the lever arm to the object at a connection location that is different from other connection locations of the other actuation modules so that pivoting the lever arm about the fulcrum induces the second flexure bearing to pivot the object about an object pivot axis defined between two of the other connection locations while the second flexure bearing decouples the lever arm from object displacements induced by two of the other actuation modules connected to the two other connection locations defining the object pivot axis, wherein the plurality of micro-assemblies are arranged with themore » « less

Inventors:: Hopkins, Jonathan; Panas, Robert Matthew

Issue Date:: 2019-10-15

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1600158

Patent Number(s):: 10444492

Application Number:: 14/218,970

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Classifications (CPCs):: G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

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G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B26/101 - {with both horizontal and vertical deflecting means, e.g. raster or XY scanners

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2203/058 - Rotation out of a plane parallel to the substrate

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B7/182 - for mirrors
G02B26/0841 - {the reflecting element being moved or deformed by electrostatic means}

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2201/033 - Comb drives
B81B2203/053 - Translation according to an axis perpendicular to the substrate

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B26/105 - {with one or more pivoting mirrors or galvano-mirrors

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B3/0062 - {Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension}

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DOE Contract Number:: AC52-07NA27344

Resource Type:: Patent

Resource Relation:: Patent File Date: 03/19/2014

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING

Citation Formats


                    Hopkins, Jonathan, and Panas, Robert Matthew. Flexure-based, tip-tilt-piston actuation micro-array.  United States: N. p., 2019. 
        Web.

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                    Hopkins, Jonathan, & Panas, Robert Matthew. Flexure-based, tip-tilt-piston actuation micro-array.  United States.

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                    Hopkins, Jonathan, and Panas, Robert Matthew. Tue .  
        "Flexure-based, tip-tilt-piston actuation micro-array".  United States.  https://www.osti.gov/servlets/purl/1600158.

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@article{osti_1600158,

  title        = {Flexure-based, tip-tilt-piston actuation micro-array},

  author       = {Hopkins, Jonathan and Panas, Robert Matthew},

  abstractNote = {A flexure-based micro-array having a plurality of micro-assemblies, each comprising: an object; and at least three electrostatic actuation modules for tipping, tilting, and/or piston-actuating the object, each actuation module comprising: a base with first and second electrodes electrically isolated from each other; an electrically conductive lever arm; a first flexure bearing suspending the lever arm adjacent the first and second electrodes so that electrical activation of at least one of the first and second electrodes produces an electrostatic moment of force on the lever arm to resiliently bias the first flexure bearing and pivot the lever arm about a fulcrum; and a second flexure bearing connecting the lever arm to the object at a connection location that is different from other connection locations of the other actuation modules so that pivoting the lever arm about the fulcrum induces the second flexure bearing to pivot the object about an object pivot axis defined between two of the other connection locations while the second flexure bearing decouples the lever arm from object displacements induced by two of the other actuation modules connected to the two other connection locations defining the object pivot axis, wherein the plurality of micro-assemblies are arranged with the objects juxtaposed in a substantially 2D array.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {10}

}

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