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Title: Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet

In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
Inventors:
;
Issue Date:
OSTI Identifier:
1363762
Assignee:
Varian Semiconductor Equipment Associates, Inc. DOEEE
Patent Number(s):
9,677,193
Application Number:
14/242,566
Contract Number:
EE0000595
Resource Relation:
Patent File Date: 2014 Apr 01
Research Org:
Varian Semiconductor Equipment Associates, Inc. Gloucester, MA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

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