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Title: Removing a sheet from the surface of a melt using elasticity and buoyancy

Patent ·
OSTI ID:1136751

Embodiments related to sheet production are disclosed. A melt of a material is cooled to form a sheet of the material on the melt. The sheet is formed in a first region at a first sheet height. The sheet is translated to a second region such that it has a second sheet height higher than the first sheet height. The sheet is then separated from the melt. A seed wafer may be used to form the sheet.

Research Organization:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (USA).
Sponsoring Organization:
USDOE
DOE Contract Number:
EE0000595
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
Patent Number(s):
8,764,901
Application Number:
13/039,808
OSTI ID:
1136751
Country of Publication:
United States
Language:
English

References (13)

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Floating Sheet Production Apparatus and Method patent-application September 2009
Method and Apparatus for the Production of Crystalline Silicon Substrates patent-application February 2010
Investigation of the meniscus stability in horizontal crystal ribbon growth journal September 1980
Improvements in the Horizontal Ribbon Growth technique for single crystal silicon journal September 1980