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Title: System and method for crystalline sheet growth using a cold block and gas jet

Abstract

A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1439330
Patent Number(s):
9957636
Application Number:
14/226,991
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. (Gloucester, MA)
Patent Classifications (CPCs):
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
EE0000595
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Mar 27
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, and Sinclair, Frank. System and method for crystalline sheet growth using a cold block and gas jet. United States: N. p., 2018. Web.
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, & Sinclair, Frank. System and method for crystalline sheet growth using a cold block and gas jet. United States.
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, and Sinclair, Frank. Tue . "System and method for crystalline sheet growth using a cold block and gas jet". United States. https://www.osti.gov/servlets/purl/1439330.
@article{osti_1439330,
title = {System and method for crystalline sheet growth using a cold block and gas jet},
author = {Kellerman, Peter L. and Mackintosh, Brian and Carlson, Frederick M. and Morrell, David and Moradian, Ala and Desai, Nandish and Sun, Dawei and Sinclair, Frank},
abstractNote = {A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {5}
}

Works referenced in this record:

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patent, October 1980


Lateral pulling growth of crystal ribbons and apparatus therefor
patent, April 1981


Method and apparatus for producing a dislocation-free crystalline sheet
patent, October 2010


Floating sheet production apparatus and method
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Sheet manufacturing method, sheet, sheet manufacturing apparatus, and solar cell
patent-application, June 2003


Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
patent-application, July 2007


Apparatus and Method for Manufacturing Silicon Substrate, and Silicon Substrate
patent-application, April 2010


Formation of Silicon Sheets by Impinging Fluid
patent-application, November 2010


Method for Achieving Sustained Anisotropic Crystal Growth on the Surface of a Melt
patent-application, August 2013


Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
journal, September 1980