System and method for crystalline sheet growth using a cold block and gas jet
Abstract
A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.
- Inventors:
- Issue Date:
- Research Org.:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1439330
- Patent Number(s):
- 9957636
- Application Number:
- 14/226,991
- Assignee:
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. (Gloucester, MA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- EE0000595
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Mar 27
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, and Sinclair, Frank. System and method for crystalline sheet growth using a cold block and gas jet. United States: N. p., 2018.
Web.
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, & Sinclair, Frank. System and method for crystalline sheet growth using a cold block and gas jet. United States.
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, and Sinclair, Frank. Tue .
"System and method for crystalline sheet growth using a cold block and gas jet". United States. https://www.osti.gov/servlets/purl/1439330.
@article{osti_1439330,
title = {System and method for crystalline sheet growth using a cold block and gas jet},
author = {Kellerman, Peter L. and Mackintosh, Brian and Carlson, Frederick M. and Morrell, David and Moradian, Ala and Desai, Nandish and Sun, Dawei and Sinclair, Frank},
abstractNote = {A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {5}
}
Works referenced in this record:
Lateral pulling growth of crystal ribbons and apparatus therefor
patent, October 1980
- Shudo, Taro; Kudo, Bosshi; Tamai, Yasuhiro
- US Patent Document 4,226,834
Lateral pulling growth of crystal ribbons and apparatus therefor
patent, April 1981
- Shudo, Taro; Kudo, Bosshi; Tamai, Yasuhiro
- US Patent Document 4,264,407
Method and apparatus for producing crystalline ribbons
patent, September 1981
- Jewett, David N.
- US Patent Document 4,289,571
Controlled heat sink for crystal ribbon growth
patent, November 1983
- Jewett, David N.
- US Patent Document 4,417,944
Method and apparatus for zone recrystallization
patent, June 1988
- Bleil, Carl E.
- US Patent Document 4,749,438
Appartus for making inorganic webs and structures formed thereof
patent, July 1992
- Kuehnle, Manfred R.
- US Patent Document 5,128,111
Binary and ternary crystal purification and growth method and apparatus
patent, October 2004
- Pandelisev, Kiril A.
- US Patent Document 6,800,137
Formation of a silicon sheet by cold surface casting
patent, November 2007
- Gralenski, Nicholas
- US Patent Document 7,294,197
Method and apparatus for producing a dislocation-free crystalline sheet
patent, October 2010
- Kellerman, Peter L.; Sinclair, Frank; Carlson, Frederick M.
- US Patent Document 7,816,153
Floating sheet production apparatus and method
patent, December 2010
- Kellerman, Peter L.; Sinclair, Frank
- US Patent Document 7,855,087
Sheet manufacturing method, sheet, sheet manufacturing apparatus, and solar cell
patent-application, June 2003
- Tsukuda, Yoshihiro; Tangiguchi, Hiroshi; Yano, Kozoburon
- US Patent Application 10/323666; 20030111105
Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
patent-application, July 2007
- Kholodenko, Arnold V.; Bachrach, Robert Z.; Mandelboym, Mark
- US Patent Application 11/325089; 20070158654
Apparatus and Method for Manufacturing Silicon Substrate, and Silicon Substrate
patent-application, April 2010
- Kojima, Gen; Yokoyama, Hiroshi; Hayashi, Yutaka
- US Patent Application 12/524438; 20100086465
Formation of Silicon Sheets by Impinging Fluid
patent-application, November 2010
- Bang, Christopher A.
- US Patent Application 12/467753; 20100288186
Method for Achieving Sustained Anisotropic Crystal Growth on the Surface of a Melt
patent-application, August 2013
- Kellerman, Peter L.; Sun, Dawei; Mackintosh, Brian H.
- US Patent Application 13/398874; 20130213296
Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
journal, September 1980
- Kudo, B.
- Journal of Crystal Growth, Vol. 50, Issue 1, p. 247-259