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Title: System and method for crystalline sheet growth using a cold block and gas jet

Abstract

A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1439330
Patent Number(s):
9,957,636
Application Number:
14/226,991
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. (Gloucester, MA) DOEEE
DOE Contract Number:  
EE0000595
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Mar 27
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, and Sinclair, Frank. System and method for crystalline sheet growth using a cold block and gas jet. United States: N. p., 2018. Web.
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, & Sinclair, Frank. System and method for crystalline sheet growth using a cold block and gas jet. United States.
Kellerman, Peter L., Mackintosh, Brian, Carlson, Frederick M., Morrell, David, Moradian, Ala, Desai, Nandish, Sun, Dawei, and Sinclair, Frank. Tue . "System and method for crystalline sheet growth using a cold block and gas jet". United States. https://www.osti.gov/servlets/purl/1439330.
@article{osti_1439330,
title = {System and method for crystalline sheet growth using a cold block and gas jet},
author = {Kellerman, Peter L. and Mackintosh, Brian and Carlson, Frederick M. and Morrell, David and Moradian, Ala and Desai, Nandish and Sun, Dawei and Sinclair, Frank},
abstractNote = {A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {5}
}

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Works referenced in this record:

Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
journal, September 1980