Capacitive microelectromechanical switches with dynamic soft-landing
Abstract
A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.
- Inventors:
- Issue Date:
- Research Org.:
- Purdue Univ., West Lafayette, IN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1338054
- Patent Number(s):
- 9536692
- Application Number:
- 14/881,185
- Assignee:
- PURDUE RESEARCH FOUNDATION (West Lafayette, IN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03K - PULSE TECHNIQUE
- DOE Contract Number:
- FC52-08NA28617
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Oct 13
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Jain, Ankit, Alam, Muhammad Ashraful, and Nair, Pradeep. Capacitive microelectromechanical switches with dynamic soft-landing. United States: N. p., 2017.
Web.
Jain, Ankit, Alam, Muhammad Ashraful, & Nair, Pradeep. Capacitive microelectromechanical switches with dynamic soft-landing. United States.
Jain, Ankit, Alam, Muhammad Ashraful, and Nair, Pradeep. Tue .
"Capacitive microelectromechanical switches with dynamic soft-landing". United States. https://www.osti.gov/servlets/purl/1338054.
@article{osti_1338054,
title = {Capacitive microelectromechanical switches with dynamic soft-landing},
author = {Jain, Ankit and Alam, Muhammad Ashraful and Nair, Pradeep},
abstractNote = {A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 03 00:00:00 EST 2017},
month = {Tue Jan 03 00:00:00 EST 2017}
}
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