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Title: Capacitive microelectromechanical switches with dynamic soft-landing

A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.
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Issue Date:
OSTI Identifier:
Purdue Research Foundation (West Lafayette, IN) NNSASC
Patent Number(s):
Application Number:
Contract Number:
Resource Relation:
Patent File Date: 2012 May 07
Research Org:
Purdue Research Foundation, West Lafayette, IN (United States)
Sponsoring Org:
Country of Publication:
United States

Other works cited in this record:

State indicating relay
patent, November 1992

Contact unit for electromagnetic relays
patent, October 2001

Capacitive RF-MEMS device with integrated decoupling capacitor
patent, August 2012

MEMs devices
patent, December 2012

Waveform design for pulse-and-hold electrostatic actuation in MEMS
journal, February 2007
  • Sumali, Hartono; Massad, Jordan E.; Czaplewski, David A.
  • Sensors and Actuators A: Physical, Vol. 134, Issue 1, p. 213-220
  • DOI: 10.1016/j.sna.2006.04.041

Pull-in time–energy product of electrostatic actuators: comparison of experiments with simulation
journal, May 2000

Contact-Printed Microelectromechanical Systems
journal, April 2010
  • Packard, Corinne E.; Murarka, Apoorva; Lam, Eric W.
  • Advanced Materials, Vol. 22, Issue 16, p. 1840-1844
  • DOI: 10.1002/adma.200903034

Fabricating nanowire devices on diverse substrates by simple transfer-printing methods
journal, May 2010
  • Lee, C. H.; Kim, D. R.; Zheng, X.
  • Proceedings of the National Academy of Sciences, Vol. 107, Issue 22, p. 9950-9955
  • DOI: 10.1073/pnas.0914031107

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