Silicon force sensor and method of using the same
Abstract
The various technologies presented herein relate to a sensor for measurement of high forces and/or high load shock rate(s), whereby the sensor utilizes silicon as the sensing element. A plate of Si can have a thinned region formed therein on which can be formed a number of traces operating as a Wheatstone bridge. The brittle Si can be incorporated into a layered structure comprising ductile and/or compliant materials. The sensor can have a washer-like configuration which can be incorporated into a nut and bolt configuration, whereby tightening of the nut and bolt can facilitate application of a compressive preload upon the sensor. Upon application of an impact load on the bolt, the compressive load on the sensor can be reduced (e.g., moves towards zero-load), however the magnitude of the preload can be such that the load on the sensor does not translate to tensile stress being applied to the sensor.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1327919
- Patent Number(s):
- 9459161
- Application Number:
- 15/170,355
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01L - MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2016 Jun 01
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE
Citation Formats
Galambos, Paul C., Crenshaw, Thomas B., Nishida, Erik E., Burnett, Damon J., and Lantz, Jeffrey W. Silicon force sensor and method of using the same. United States: N. p., 2016.
Web.
Galambos, Paul C., Crenshaw, Thomas B., Nishida, Erik E., Burnett, Damon J., & Lantz, Jeffrey W. Silicon force sensor and method of using the same. United States.
Galambos, Paul C., Crenshaw, Thomas B., Nishida, Erik E., Burnett, Damon J., and Lantz, Jeffrey W. Tue .
"Silicon force sensor and method of using the same". United States. https://www.osti.gov/servlets/purl/1327919.
@article{osti_1327919,
title = {Silicon force sensor and method of using the same},
author = {Galambos, Paul C. and Crenshaw, Thomas B. and Nishida, Erik E. and Burnett, Damon J. and Lantz, Jeffrey W.},
abstractNote = {The various technologies presented herein relate to a sensor for measurement of high forces and/or high load shock rate(s), whereby the sensor utilizes silicon as the sensing element. A plate of Si can have a thinned region formed therein on which can be formed a number of traces operating as a Wheatstone bridge. The brittle Si can be incorporated into a layered structure comprising ductile and/or compliant materials. The sensor can have a washer-like configuration which can be incorporated into a nut and bolt configuration, whereby tightening of the nut and bolt can facilitate application of a compressive preload upon the sensor. Upon application of an impact load on the bolt, the compressive load on the sensor can be reduced (e.g., moves towards zero-load), however the magnitude of the preload can be such that the load on the sensor does not translate to tensile stress being applied to the sensor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 04 00:00:00 EDT 2016},
month = {Tue Oct 04 00:00:00 EDT 2016}
}
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