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Title: Beam imaging sensor and method for using same

The present invention relates generally to the field of sensors for beam imaging and, in particular, to a new and useful beam imaging sensor for use in determining, for example, the power density distribution of a beam including, but not limited to, an electron beam or an ion beam. In one embodiment, the beam imaging sensor of the present invention comprises, among other items, a circumferential slit that is either circular, elliptical or polygonal in nature. In another embodiment, the beam imaging sensor of the present invention comprises, among other things, a discontinuous partially circumferential slit. Also disclosed is a method for using the various beams sensor embodiments of the present invention.
Inventors:
;
Issue Date:
OSTI Identifier:
1338056
Assignee:
BWXT Nuclear Operations Group, Inc. (Lynchburg, VA ORNL
Patent Number(s):
9,535,100
Application Number:
14/595,593
Contract Number:
AC11-07PN38361
Resource Relation:
Patent File Date: 2015 Jan 13
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Other works cited in this record:

Particle beam measurement apparatus using beam kinetic energy to change the heat sensitive resistance of the detection probe
patent, August 1965

Microwave electron discharge device having annular resonant cavity
patent, November 1965

Apparatus for measuring the energy distribution of electrons extracted from solids
patent, April 1969

Improvements to the controlling of focussing of electronic bombardment
patent, September 1972

Method for controlling and stabilizing fusion depth in electron-beam welding and device for effecting same
patent, November 1978

Charged-particle analyzer
patent, January 1979

Charged particle beam processing with magnetic field compensation
patent, September 1980

Method and apparatus for electron beam welding
patent, January 1982

Ceramic type sensor device
patent, June 1982

Signal detection mechanism from electron multiplier
patent, June 1982

Position regulation of a charge carrier beam
patent, September 1982

Electron beam welding with beam focus controlled responsive to absorbed beam power
patent, November 1982

Apparatus and method for monitoring the intensities of charged particle beams
patent, November 1982

High power linear pulsed beam annealer
patent, February 1983

Electron beam exposure apparatus
patent, February 1984

Apparatus for measuring charged particle beam
patent, June 1984

Highly-steady beam generating for charged particles
patent, August 1984

Process and apparatus for the in-line inspection of the depth of a weld by a pulse beam
patent, January 1986

Dose control apparatus
patent, May 1986

In-line beam current monitor
patent, December 1986

Method of positioning a beam to a specific portion of a semiconductor wafer
patent, January 1987

Method and apparatus for measuring the momentum, energy, power, and power density profile of intense particle beams
patent, October 1992

Electron beam welding
patent, March 1994

Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark
patent, August 1994

System for tomographic determination of the power distribution in electron beams
patent, January 1995

Industrial material processing electron linear accelerator
patent, March 1995

Indirectly sensing accelerator beam currents for limiting maximum beam current magnitude
patent, August 1995

Triple-probe plasma measuring apparatus for correcting space potential errors
patent, September 1995

Electron radiation dose tailoring by variable beam pulse generation
patent, September 1995

Electron beam current measuring device
patent, September 1995

System for tomographic determination of the power distribution in electron beams
patent, November 1995

Method of automatic measurement and focus of an electron beam and apparatus therefor
patent, January 1996

Electron beam machining using rotating and shaped beam power distribution
patent, July 1996

Modified Faraday cup
September 1996

Method for determination of degree of molecular dissociation in plasma using combined electrostatic measurement and emission spectroscopy
patent, October 1996

Tomographic determination of the power distribution in electron beams
patent, December 1996

Electron beam device with single crystal window and expansion-matched anode
patent, March 1997

System for high resolution imaging and measurement of topographic and material features on a specimen
patent, July 1997

Process and apparatus for measuring charge quantity flowing in a vacuum
patent, July 1997

Method and apparatus for measuring electron beam effective focus
patent, March 1998

Plasma density monitor and method
patent, June 1998

Electron beam processing apparatus
patent, June 1998

Apparatus and method for a modular electron beam system for the treatment of surfaces
patent, June 1999

Methods for evaluating image-forming characteristics of a projection-optical system used in a charged-particle-beam microlithography apparatus
patent, September 1999

Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
patent, November 1999

Electro-optical plasma probe
patent, March 2000

Dose monitor for plasma doping system
patent, October 2001

Shunt voltage regulator with self-contained thermal crowbar safety protection
patent, October 2001

Enhanced modified faraday cup for determination of power density distribution of electron beams
patent, October 2001

Real time monitoring of electron beam radiation dose
patent, August 2002

Electron beam irradiation process and an object irradiated with an electron beam
patent, January 2003

Particle beam current monitoring technique
patent, April 2003

Plasma density measuring method and apparatus, and plasma processing system using the same
patent, April 2003

Welding method for semiconductor materials
patent, June 2003

Servo control for high emittance electron source
patent, July 2003

On-line measurement of absorbed electron beam dosage in irradiated product
patent, September 2003

Electron beam measurement method and electron beam irradiation processing device
patent, December 2003

Electron beam processing device
patent, February 2004

Ion irradiation system
patent, November 2004

Electron beam tube and window for electron beam extraction
patent, March 2005

Electron beam treatment device
patent, April 2005

Electron beam welding method
patent, May 2005

Beam profile monitor with accurate horizontal and vertical beam profiles
patent, December 2005

Method for measuring the intensity profile of an electron beam, in particular a beam of an electron-beam machining device, and/or for measuring an optical system for an electron beam and/or for adjusting an optical system for an electron beam, measuring structure for such a method and electron-beam machining device
patent, December 2005

Fast Faraday cup with high bandwidth
patent, March 2006

Radio frequency Langmuir probe
patent, March 2006

Impedance monitoring system and method
patent, March 2006

Surface treating device and surface treating method
patent, April 2006

Processor and method for processing
patent, May 2006

Source for energetic electrons
patent, December 2006

Beam current measuring device and apparatus using the same
patent, January 2007

Thin film processing method and system
patent, March 2007

Trigger probe for determining the orientation of the power distribution of an electron beam
patent, July 2007

Method and apparatus for measuring properties of particle beams using thermo-resistive material properties
patent, October 2007

Charged particle beam detection system
patent, October 2007

Diagnostic system for profiling micro-beams
patent, October 2007

Plasma potential measuring method and apparatus, and plasma potential measuring probe
patent, October 2007

Particle beam current measurement system
patent, March 2008

Apparatus and method for controlling the beam current of a charged particle beam
patent, March 2008

Electron beam diagnostic for profiling high power beams
patent, March 2008

Multilayer detector and method for sensing an electron beam
patent, May 2008

Miniature modified Faraday cup for micro electron beams
patent, May 2008

Controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement
patent, August 2008

Measurement method of electron beam current, electron beam writing system and electron beam detector
patent, September 2008

Beam current meter
patent, October 2008

Magnetic monitoring of a Faraday cup for an ion implanter
patent, April 2009

Automated faraday sensor test system
patent, July 2009

Beam current measuring instrument and beam current measuring method using same
November 2009

Device for outputting high and/or low energy X-rays
patent, January 2010

Electron beam systems
patent, April 2010

Irradiating device and method for controlling the same
patent, April 2010

Focusing system and method for a charged particle imaging system
patent, April 2010

Charged particle beam profile measurement
patent, January 2011

Beam current sensor
patent, February 2011

Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams
patent, March 2011

Planar type frequency shift probe for measuring plasma electron densities and method and apparatus for measuring plasma electron densities
patent, October 2011

Method for the precise measurement of dependency on amplitude and phase of plurality of high frequency signals and device for carrying out said method
patent, November 2011

Electron beam processing device
patent, December 2011

Wide-dynamic range electrometer with a fast response
patent, October 2012

Use of beam deflection to control an electron beam wire deposition process
patent, January 2013

Integrated optical element and Faraday cup
patent, February 2013

Wide-dynamic range electrometer with a fast response
patent, April 2013

Plasma monitoring method
patent, April 2013

Shielded capacitive electrode
patent, July 2013

Method and system for hybrid direct manufacturing
patent, August 2013

Electron beam profile measurement system and method with optional Faraday cup
patent, September 2013

Electron beam layer manufacturing
patent, October 2013

Stage for working, focused beam working apparatus and focused beam working method
patent, December 2013

Electron beam layer manufacturing using scanning electron monitored closed loop control
patent, December 2013

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