Differentially-driven MEMS spatial light modulator
Abstract
A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175039
- Patent Number(s):
- 6791735
- Application Number:
- 10/340,317
- Assignee:
- University Of California, The Regents Of
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Stappaerts, Eddy A. Differentially-driven MEMS spatial light modulator. United States: N. p., 2004.
Web.
Stappaerts, Eddy A. Differentially-driven MEMS spatial light modulator. United States.
Stappaerts, Eddy A. Tue .
"Differentially-driven MEMS spatial light modulator". United States. https://www.osti.gov/servlets/purl/1175039.
@article{osti_1175039,
title = {Differentially-driven MEMS spatial light modulator},
author = {Stappaerts, Eddy A.},
abstractNote = {A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 14 00:00:00 EDT 2004},
month = {Tue Sep 14 00:00:00 EDT 2004}
}