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Title: Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1349886
Assignee:
UChicago Argonne, LLC (Chicago, IL) ANL
Patent Number(s):
8,976,933
Application Number:
13/246,008
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2011 Sep 27
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Other works cited in this record:

Capacitive MEMS microphones
journal, September 2005
  • Elko, Gary W.; Pardo, Flavio; L√≥pez, Daniel
  • Bell Labs Technical Journal, Vol. 10, Issue 3, p. 187-198
  • DOI: 10.1002/bltj.20113

An ultrafast mechanical shutter for X-rays
journal, February 1989
  • LeGrand, Alan D.; Schildkamp, Wilfried; Blank, Basil
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 275, Issue 2, p. 442-446
  • DOI: 10.1016/0168-9002(89)90722-5

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