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Title: Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

Abstract

A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1349886
Patent Number(s):
8976933
Application Number:
13/246,008
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Sep 27
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Citation Formats

Lopez, Daniel, Shenoy, Gopal, Wang, Jin, Walko, Donald A., Jung, Il-Woong, and Mukhopadhyay, Deepkishore. Method for spatially modulating X-ray pulses using MEMS-based X-ray optics. United States: N. p., 2015. Web.
Lopez, Daniel, Shenoy, Gopal, Wang, Jin, Walko, Donald A., Jung, Il-Woong, & Mukhopadhyay, Deepkishore. Method for spatially modulating X-ray pulses using MEMS-based X-ray optics. United States.
Lopez, Daniel, Shenoy, Gopal, Wang, Jin, Walko, Donald A., Jung, Il-Woong, and Mukhopadhyay, Deepkishore. Tue . "Method for spatially modulating X-ray pulses using MEMS-based X-ray optics". United States. https://www.osti.gov/servlets/purl/1349886.
@article{osti_1349886,
title = {Method for spatially modulating X-ray pulses using MEMS-based X-ray optics},
author = {Lopez, Daniel and Shenoy, Gopal and Wang, Jin and Walko, Donald A. and Jung, Il-Woong and Mukhopadhyay, Deepkishore},
abstractNote = {A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {3}
}

Works referenced in this record:

Combining X-ray fluorescence visualizer, imager, or information provider
patent, January 2010


A MEMS-based high frequency x-ray chopper
journal, April 2009


Capacitive MEMS microphones
journal, September 2005


MEMS-Based Channelized Dispersion Compensator With Flat Passbands
journal, January 2004


A synchronized rotating crystal x-ray beam chopper
journal, August 2002


Extraction of single bunches of synchrotron radiation from storage rings with an X-ray chopper based on a rotating mirror
journal, September 1999


On the design of ultrafast shutters for time-resolved synchrotron experiments
journal, December 2006


An ultrafast mechanical shutter for X-rays
journal, February 1989

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  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 275, Issue 2, p. 442-446
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