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Title: Method of fabricating a micro machine

Abstract

A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.

Inventors:
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1163671
Patent Number(s):
8,884,474
Application Number:
11/757,313
Assignee:
MicroZeus, LLC (Dallas, TX)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2007 Jun 01
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Stalford, Harold L. Method of fabricating a micro machine. United States: N. p., 2014. Web.
Stalford, Harold L. Method of fabricating a micro machine. United States.
Stalford, Harold L. Tue . "Method of fabricating a micro machine". United States. https://www.osti.gov/servlets/purl/1163671.
@article{osti_1163671,
title = {Method of fabricating a micro machine},
author = {Stalford, Harold L},
abstractNote = {A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {11}
}

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