Method of fabricating a micro machine

Stalford, Harold L

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Title: Method of fabricating a micro machine

Abstract

A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.

Inventors:: Stalford, Harold L

Issue Date:: 2014-11-11

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1163671

Patent Number(s):: 8884474

Application Number:: 11/757,313

Assignee:: MicroZeus, LLC (Dallas, TX)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B7/02 - containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
H02N10/00 - Electric motors using thermal effects {

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2007 Jun 01

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY

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@article{osti_1163671,

  title        = {Method of fabricating a micro machine},

  author       = {Stalford, Harold L},

  abstractNote = {A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {11}

}

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Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anodemore » « less
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Method for fabricating arrays of micro-needles

Patent Kenney, Christopher J.

An array of micro-needles is created by forming an array pattern on the upper surface of a silicon wafer and etching through openings in the pattern to define micro-needle sized cavities having a desired depth. The mold thus formed may be filled with electrically conductive material, after which a desired fraction of the silicon wafer bulk is removed from the bottom-up by etching, to expose an array of projecting micro-needles. The mold may instead be filled with a flexible material to form a substrate useful in gene cell probing. An array of hollow micro-needles may be formed by coating themore » « less
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Title: Method of fabricating a micro machine

Abstract

Citation Formats

Remote Control Valve Operator patent, September 1961

Monitoring Devices for Detecting Fission Products in a Gaseous Stream patent, June 1964

Cassette tape recorder patent, February 1979

Direct current micromotor patent, April 1982

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train patent, January 1984

Rotary, vertical-drive, tethered micromotor patent, February 1993

Shaft support assembly for use in a polygon mirror drive motor patent, October 1993

Cooling microfan arrangements and process patent, March 1994

Stirring device patent, September 1995

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process patent, May 1997

Fully integrated magnetic micromotors and methods for their fabrication patent, January 1998

Process to destroy biological activity in protein-containing feed patent, July 1998

Micro-turbo generator device patent, February 1999

Microelectromechanical reciprocating-tooth indexing apparatus patent, September 1999

Compliant displacement-multiplying apparatus for microelectromechanical systems patent, January 2001

Micromotor and micropump patent, January 2001

Microelectromechanical ratcheting apparatus patent, April 2001

Floating brush seal patent, June 2001

Microelectromechanical ratcheting apparatus patent, November 2001

Mems magnetically actuated switches and associated switching arrays patent, April 2002

Microturbomachinery patent, May 2002

Shaft sealing assembly having replaceable sealing sleeve patent, September 2003

Low cost integrated out-of-plane micro-device structures and method of making patent, December 2003

Method of forming an out-of-plane structure patent, February 2005

Erected mirror optical switch patent, June 2005

Photolithographically-patterned variable capacitor structures and method of making patent, July 2005

System and method for handling microcomponent parts for performing assembly of micro-devices patent, December 2005

Piezoelectric motors and motor driving configurations patent, December 2005

Method for assembly of complementary-shaped receptacle site and device microstructures patent, March 2006

Sockets for microassembly patent, April 2006

Microstructures using carbon fiber composite honeycomb beams patent, May 2006

Microassembly and method for using same patent, May 2006

Method of manufacturing a microcomponent assembly patent, August 2006

Piezoelectric actuator, timepiece, and electronic device patent, September 2006

Magnetically-coupled actuating valve assembly patent, January 2007

Positioning device for microscopic motion patent, March 2007

Coupled drive multi-position fluid valve apparatus and method patent, April 2007

Modular manipulation system for manipulating a sample under study with a microscope patent, May 2007

Drive apparatus and device with same patent, May 2008

Sealed mover assembly patent, September 2008

MEMS micromotor and timepiece equipped with this micromotor patent, March 2009

Method of appraising and insuring intellectual property patent, May 2009

Drive device, particularly for a clockwork mechanism patent, December 2009

Method for assembling precision miniature bearings for minisystems and microsystems patent, April 2010

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly patent-application, April 2002

Bi-directional micromechanical latching linear actuator patent-application, December 2002

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices patent-application, October 2003

Low cost integrated out-of-plane micro-device structures and method of making patent-application,

MEMS based motor patent-application, June 2004

Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems patent-application, July 2004

Sealed Mover Assembly patent-application, January 2005

Oil-retaining structure for fan patent-application, February 2005

Piezoelectric actuator module, motor module and apparatus patent-application, April 2005

Method and device for injecting at least one product in an egg for treating the embryo patent-application, June 2005

Method of making photolithographically-patterned out-of-plane coil structures patent-application, December 2005

Pagewidth inkjet printhead assembly with longitudinally extending sets of nozzles patent-application, May 2006

MEMS Release Methods patent-application, October 2006

Assembly Process for Out-of-Plane MEMS and Three-Axis Sensors patent-application, April 2007

Self-assembling mems devices having thermal actuation patent-application, May 2007

Method and Structure for an Out-of-Plane Compliant Micro Actuator patent-application, May 2007

Use of magnetic beads for tissue DNA extraction and IS6110 Mycobacterium tuberculosis PCR journal, June 1999

Tensile Strength of Cell Walls of Living Cells journal, October 1985

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection journal, January 2001

Compact and precise positioner based on the Inchworm principle journal, November 2000

Out-of-plane rotary micromirrors for reconfigurable photonic applications conference, January 2003

Magnetic bead handling on-chip: new opportunities for analytical applications journal, October 2004

A 64-site multishank CMOS low-profile neural stimulating probe journal, January 1996

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion journal, January 2006

Regeneration microelectrode array for peripheral nerve recording and stimulation journal, September 1992

Out of plane motion of assembled microstructures using a single-mask SOI process conference, January 2005

Manipulation of biological cells using a microelectromagnet matrix journal, August 2004

Electrostatic microactuators with integrated gear linkages for mechanical power transmission conference, January 1996

A finite element model of cell deformation during magnetic bead twisting journal, October 2002

Laterally actuated torsional micromirrors for large static deflection journal, February 2003

Solid-state microsensors for cortical nerve recordings journal, July 1994

Device transplant of optical MEMS for out of plane beam steering conference, January 2001

Development of surface micromachining technologies for microfluidics and bioMEMS conference, September 2001

Remote Control Valve Operator
patent, September 1961

Monitoring Devices for Detecting Fission Products in a Gaseous Stream
patent, June 1964

Cassette tape recorder
patent, February 1979

Direct current micromotor
patent, April 1982

Analog-display electronic watch with stator mounted rotor, hand spindles and gear train
patent, January 1984

Rotary, vertical-drive, tethered micromotor
patent, February 1993

Shaft support assembly for use in a polygon mirror drive motor
patent, October 1993

Cooling microfan arrangements and process
patent, March 1994

Stirring device
patent, September 1995

Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
patent, May 1997

Fully integrated magnetic micromotors and methods for their fabrication
patent, January 1998

Process to destroy biological activity in protein-containing feed
patent, July 1998

Micro-turbo generator device
patent, February 1999

Microelectromechanical reciprocating-tooth indexing apparatus
patent, September 1999

Compliant displacement-multiplying apparatus for microelectromechanical systems
patent, January 2001

Micromotor and micropump
patent, January 2001

Microelectromechanical ratcheting apparatus
patent, April 2001

Floating brush seal
patent, June 2001

Microelectromechanical ratcheting apparatus
patent, November 2001

Mems magnetically actuated switches and associated switching arrays
patent, April 2002

Microturbomachinery
patent, May 2002

Shaft sealing assembly having replaceable sealing sleeve
patent, September 2003

Low cost integrated out-of-plane micro-device structures and method of making
patent, December 2003

Method of forming an out-of-plane structure
patent, February 2005

Erected mirror optical switch
patent, June 2005

Photolithographically-patterned variable capacitor structures and method of making
patent, July 2005

System and method for handling microcomponent parts for performing assembly of micro-devices
patent, December 2005

Piezoelectric motors and motor driving configurations
patent, December 2005

Method for assembly of complementary-shaped receptacle site and device microstructures
patent, March 2006

Sockets for microassembly
patent, April 2006

Microstructures using carbon fiber composite honeycomb beams
patent, May 2006

Microassembly and method for using same
patent, May 2006

Method of manufacturing a microcomponent assembly
patent, August 2006

Piezoelectric actuator, timepiece, and electronic device
patent, September 2006

Magnetically-coupled actuating valve assembly
patent, January 2007

Positioning device for microscopic motion
patent, March 2007

Coupled drive multi-position fluid valve apparatus and method
patent, April 2007

Modular manipulation system for manipulating a sample under study with a microscope
patent, May 2007

Drive apparatus and device with same
patent, May 2008

Sealed mover assembly
patent, September 2008

MEMS micromotor and timepiece equipped with this micromotor
patent, March 2009

Method of appraising and insuring intellectual property
patent, May 2009

Drive device, particularly for a clockwork mechanism
patent, December 2009

Method for assembling precision miniature bearings for minisystems and microsystems
patent, April 2010

Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
patent-application, April 2002

Bi-directional micromechanical latching linear actuator
patent-application, December 2002

Complex Microdevices and Apparatus and Methods for Fabricating Such Devices
patent-application, October 2003

Low cost integrated out-of-plane micro-device structures and method of making
patent-application,

MEMS based motor
patent-application, June 2004

Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems
patent-application, July 2004

Sealed Mover Assembly
patent-application, January 2005

Oil-retaining structure for fan
patent-application, February 2005

Piezoelectric actuator module, motor module and apparatus
patent-application, April 2005

Method and device for injecting at least one product in an egg for treating the embryo
patent-application, June 2005

Method of making photolithographically-patterned out-of-plane coil structures
patent-application, December 2005

Pagewidth inkjet printhead assembly with longitudinally extending sets of nozzles
patent-application, May 2006

MEMS Release Methods
patent-application, October 2006

Assembly Process for Out-of-Plane MEMS and Three-Axis Sensors
patent-application, April 2007

Self-assembling mems devices having thermal actuation
patent-application, May 2007

Method and Structure for an Out-of-Plane Compliant Micro Actuator
patent-application, May 2007

Use of magnetic beads for tissue DNA extraction and IS6110 Mycobacterium tuberculosis PCR
journal, June 1999

Tensile Strength of Cell Walls of Living Cells
journal, October 1985

Development and Characterization of Microfluidic Devices and Systems for Magnetic Bead-Based Biochemical Detection
journal, January 2001

Compact and precise positioner based on the Inchworm principle
journal, November 2000

Out-of-plane rotary micromirrors for reconfigurable photonic applications
conference, January 2003

Magnetic bead handling on-chip: new opportunities for analytical applications
journal, October 2004

A 64-site multishank CMOS low-profile neural stimulating probe
journal, January 1996

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion
journal, January 2006

Regeneration microelectrode array for peripheral nerve recording and stimulation
journal, September 1992

Out of plane motion of assembled microstructures using a single-mask SOI process
conference, January 2005

Manipulation of biological cells using a microelectromagnet matrix
journal, August 2004

Electrostatic microactuators with integrated gear linkages for mechanical power transmission
conference, January 1996

A finite element model of cell deformation during magnetic bead twisting
journal, October 2002

Laterally actuated torsional micromirrors for large static deflection
journal, February 2003

Solid-state microsensors for cortical nerve recordings
journal, July 1994

Device transplant of optical MEMS for out of plane beam steering
conference, January 2001

Development of surface micromachining technologies for microfluidics and bioMEMS
conference, September 2001

Micro and Mesoscale Robotic Assembly
journal, January 2004

Applications of MEMS in Surgery
journal, January 2004

A long-term in vitro silicon-based microelectrode-neuron connection
journal, January 1988