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Title: Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.
Inventors:
; ; ; ; ; ;
Issue Date:
OSTI Identifier:
1348369
Assignee:
Teledyne Scientific & Imaging, LLC HQPR
Patent Number(s):
9,607,748
Application Number:
14/476,644
Contract Number:
AR0000113
Resource Relation:
Patent File Date: 2014 Sep 03
Research Org:
Teledyne Scientific & Imaging, LLC. Thousand Oaks, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Works referenced in this record:

Design and Realization of Highly Integrated Isolated DC/DC Microconverter
journal, March 2011
  • Deleage, Olivier; Crebier, Jean-Christophe; Brunet, Magali
  • IEEE Transactions on Industry Applications, Vol. 47, Issue 2, p. 930-938
  • DOI: 10.1109/TIA.2010.2103390

Integrated inductors with magnetic materials for on-chip power conversion
conference, August 2011