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Title: Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.
Inventors:
; ; ; ; ; ;
Issue Date:
OSTI Identifier:
1348369
Assignee:
Teledyne Scientific & Imaging, LLC HQPR
Patent Number(s):
9,607,748
Application Number:
14/476,644
Contract Number:
AR0000113
Resource Relation:
Patent File Date: 2014 Sep 03
Research Org:
Teledyne Scientific & Imaging, LLC. Thousand Oaks, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Other works cited in this record:

Miniature inductor for integrated circuits and devices
patent, December 1991

Semiconductor device having inductor element made of first conductive layer of spiral configuration electrically connected to second conductive layer of insular configuration
patent, December 1999

Miniature transformers for millimachined instruments
patent, May 2001

Method of fabricating on-chip inductor
patent, September 2001

Microfabricated system for magnetic field generation and focusing
patent, September 2010

Integrated inductor and method for manufacturing an integrated inductor
patent, December 2011

Integrated circuits with magnetic core inductors and methods of fabrications thereof
patent, June 2013

Monolithic DC/DC power management module with surface FET
patent, October 2013

Design and Fabrication of Integrated Power Inductor Based on Silicon Molding Technology
conference, June 2007

Design and Realization of Highly Integrated Isolated DC/DC Microconverter
journal, March 2011
  • Deleage, Olivier; Crebier, Jean-Christophe; Brunet, Magali
  • IEEE Transactions on Industry Applications, Vol. 47, Issue 2, p. 930-938
  • DOI: 10.1109/TIA.2010.2103390

Integrated inductors with magnetic materials for on-chip power conversion
conference, August 2011

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