Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof
Abstract
A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.
- Inventors:
- Issue Date:
- Research Org.:
- Teledyne Scientific & Imaging, LLC. Thousand Oaks, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1348369
- Patent Number(s):
- 9607748
- Application Number:
- 14/476,644
- Assignee:
- Teledyne Scientific & Imaging, LLC
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AR0000113
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Sep 03
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; 36 MATERIALS SCIENCE
Citation Formats
Mihailovich, Robert E., Papavasiliou, Alex P., Mehrotra, Vivek, Stupar, Philip A., Borwick, III, Robert L., Ganguli, Rahul, and DeNatale, Jeffrey F. Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof. United States: N. p., 2017.
Web.
Mihailovich, Robert E., Papavasiliou, Alex P., Mehrotra, Vivek, Stupar, Philip A., Borwick, III, Robert L., Ganguli, Rahul, & DeNatale, Jeffrey F. Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof. United States.
Mihailovich, Robert E., Papavasiliou, Alex P., Mehrotra, Vivek, Stupar, Philip A., Borwick, III, Robert L., Ganguli, Rahul, and DeNatale, Jeffrey F. Tue .
"Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof". United States. https://www.osti.gov/servlets/purl/1348369.
@article{osti_1348369,
title = {Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof},
author = {Mihailovich, Robert E. and Papavasiliou, Alex P. and Mehrotra, Vivek and Stupar, Philip A. and Borwick, III, Robert L. and Ganguli, Rahul and DeNatale, Jeffrey F.},
abstractNote = {A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {3}
}
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