Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode

Resnick, Paul J.; Langlois, Eric

Advanced Search OptionsAdvanced Search queries use a traditional Term Search. For more info, see our FAQ.

All Fields:

Patent Title:

Abstract:

Assignee:

Inventor(s):

Patent Number:

Patent Classification (CPC):

All Classifications
A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
E05 - locks
E06 - doors, windows, shutters, or roller blinds in general
E21 - earth drilling
E99 - subject matter not otherwise provided for in this section
F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
F41 - weapons
F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
G99 - subject matter not otherwise provided for in this section
H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
H99 - subject matter not otherwise provided for in this section
Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

More Options ...

Title: Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode

Abstract

Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

Inventors:: Resnick, Paul J.; Langlois, Eric

Issue Date:: 2014-08-26

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1151787

Patent Number(s):: 8814622

Application Number:: 13/298,448

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J1/3044 - {Point emitters}
H01J1/308 - Semiconductor cathodes, e.g. cathodes with PN junction layers
H01J1/36 - Solid anodes
H01J19/24 - Cold cathodes, e.g. field-emissive cathode
H01J19/32 - Anodes
H01J19/46 - Mountings for the electrode assembly as a whole
H01J19/54 - Vessels
H01J21/20 - Tubes with more than one discharge path
H01J3/022 - {with microengineered cathode, e.g. Spindt-type}
H01J9/025 - {of field emission cathodes}
H01J9/14 - of non-emitting electrodes

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats


                    Resnick, Paul J., and Langlois, Eric. Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode.  United States: N. p., 2014. 
        Web.

Copy to clipboard


                    Resnick, Paul J., & Langlois, Eric. Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode.  United States.

Copy to clipboard


                    Resnick, Paul J., and Langlois, Eric. Tue .  
        "Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode".  United States.  https://www.osti.gov/servlets/purl/1151787.

Copy to clipboard


                    
@article{osti_1151787,

  title        = {Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode},

  author       = {Resnick, Paul J. and Langlois, Eric},

  abstractNote = {Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2014},

  month        = {8}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Cold cathode field emission device having an electrode in an encapsulating layer
patent, October 1991

Kane, Robert C.
US Patent Document 5,055,077
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5055077

Cold cathode field emission device with integral emitter ballasting
patent, August 1992

Kane, Robert C.
US Patent Document 5,142,184
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5142184

Self-aligned gated electron field emitter
patent, November 1993

Bagley, Brian G.; Marcus, Robert B.; Ravi, Tirunelveli S.
US Patent Document 5,266,530
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5266530

Field emission display devices, and field emission electron beam source and isolation structure components therefor
patent, July 1996

Jones, Gary W.; Zimmerman, Steven M.
US Patent Document 5,534,743
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5534743

Field emission cathode with resistive gate areas and electron gun using same
patent, February 1998

Imura, Hironori
US Patent Document 5,717,279
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5717279

Filamentary electron-emission device having self-aligned gate or/and lower conductive/resistive region
patent, March 2001

Macaulay, John M.; Searson, Peter C.; Duboc, Jr., Robert M.
US Patent Document 6,204,596
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6204596

Manufacture of field emission device
patent, December 2001

Hattori, Atsuo; Miyazawa, Kenichi
US Patent Document 6,329,214
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6329214

Process for fabricating a microelectromechanical structure
patent, October 2004

Sniegowski, Jeffry J.; Krygowski, Thomas W.; Mani, Seethambal S.
US Patent Document 6,808,952
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6808952

Matrix-type cold-cathode electron source device
patent, February 2013

Yamamoto, Makoto; Koga, Keisuke
US Patent Document 8,384,281
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8384281

Integrated field emission array for ion desorption
patent, September 2013

Resnick, Paul J.; Hertz, Kristin L.; Holland, Christopher E.
US Patent Document 8,536,564
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8536564

Radiation shielding for field emitters
patent-application, March 2003

Williams, Terry N.; Rolfson, J. Brett
US Patent Application 10/263490; 20030057861
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030057861

An integrated field emission array for ion desorption
journal, May 2010

Resnick, P. J.; Holland, C. E.; Schwoebel, P. R.
Microelectronic Engineering, Vol. 87, Issue 5-8, p. 1263-1265
https://doi.org/10.1016/j.mee.2009.11.036

Similar Records in DOE Patents and OSTI.GOV collections:

Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same

Patent Resnick, Paul J.; Langlois, Eric

Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anodemore » « less
Full Text Available
Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

Patent Mihailovich, Robert E.; Papavasiliou, Alex P.; Mehrotra, Vivek; ...

A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated andmore » « less
Full Text Available
Integrated resonant micro-optical gyroscope and method of fabrication

Patent Vawter, G Allen [Albuquerque, NM]; Zubrzycki, Walter J [Sandia Park, NM]; Guo, Junpeng [Albuquerque, NM]; ...

An integrated optic gyroscope is disclosed which is based on a photonic integrated circuit (PIC) having a bidirectional laser source, a pair of optical waveguide phase modulators and a pair of waveguide photodetectors. The PIC can be connected to a passive ring resonator formed either as a coil of optical fiber or as a coiled optical waveguide. The lasing output from each end of the bidirectional laser source is phase modulated and directed around the passive ring resonator in two counterpropagating directions, with a portion of the lasing output then being detected to determine a rotation rate for the integratedmore » « less
Full Text Available
Vacuum encapsulated, high temperature diamond amplified cathode capsule and method for making same

Patent Rao, Triveni; Walsh, Josh; Gangone, Elizabeth

A vacuum encapsulated, hermetically sealed cathode capsule for generating an electron beam of secondary electrons, which generally includes a cathode element having a primary emission surface adapted to emit primary electrons, an annular insulating spacer, a diamond window element comprising a diamond material and having a secondary emission surface adapted to emit secondary electrons in response to primary electrons impinging on the diamond window element, a first high-temperature solder weld disposed between the diamond window element and the annular insulating spacer and a second high-temperature solder weld disposed between the annular insulating spacer and the cathode element. The cathode capsulemore » « less
Full Text Available
Vacuum encapsulated hermetically sealed diamond amplified cathode capsule and method for making same

Patent Rao, Triveni; Walsh, John; Gangone, Elizabeth

A vacuum encapsulated, hermetically sealed cathode capsule for generating an electron beam of secondary electrons, which generally includes a cathode element having a primary emission surface adapted to emit primary electrons, an annular insulating spacer, a diamond window element comprising a diamond material and having a secondary emission surface adapted to emit secondary electrons in response to primary electrons impinging on the diamond window element, a first cold-weld ring disposed between the cathode element and the annular insulating spacer and a second cold-weld ring disposed between the annular insulating spacer and the diamond window element. The cathode capsule is formedmore » « less
Full Text Available

Similar Records

Title: Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode

Abstract

Citation Formats

Cold cathode field emission device having an electrode in an encapsulating layer patent, October 1991

Cold cathode field emission device with integral emitter ballasting patent, August 1992

Self-aligned gated electron field emitter patent, November 1993

Field emission display devices, and field emission electron beam source and isolation structure components therefor patent, July 1996

Field emission cathode with resistive gate areas and electron gun using same patent, February 1998

Filamentary electron-emission device having self-aligned gate or/and lower conductive/resistive region patent, March 2001

Manufacture of field emission device patent, December 2001

Process for fabricating a microelectromechanical structure patent, October 2004

Matrix-type cold-cathode electron source device patent, February 2013

Integrated field emission array for ion desorption patent, September 2013

Radiation shielding for field emitters patent-application, March 2003

An integrated field emission array for ion desorption journal, May 2010

Cold cathode field emission device having an electrode in an encapsulating layer
patent, October 1991

Cold cathode field emission device with integral emitter ballasting
patent, August 1992

Self-aligned gated electron field emitter
patent, November 1993

Field emission display devices, and field emission electron beam source and isolation structure components therefor
patent, July 1996

Field emission cathode with resistive gate areas and electron gun using same
patent, February 1998

Filamentary electron-emission device having self-aligned gate or/and lower conductive/resistive region
patent, March 2001

Manufacture of field emission device
patent, December 2001

Process for fabricating a microelectromechanical structure
patent, October 2004

Matrix-type cold-cathode electron source device
patent, February 2013

Integrated field emission array for ion desorption
patent, September 2013

Radiation shielding for field emitters
patent-application, March 2003

An integrated field emission array for ion desorption
journal, May 2010