Charging characteritiscs of ultrananocrystalline diamond in RF MEMS capacitive switches.
Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- DARPA
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 994055
- Report Number(s):
- ANL/MSD/JA-66397
- Country of Publication:
- United States
- Language:
- ENGLISH
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