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Chemical sensor with oscillating cantilevered probe and mechanical stop

Patent ·
OSTI ID:986569
The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
The Board of Regents of the Nevada System of Higher Education on Behalf of the University of Nevada, Reno (Reno, NV)
Patent Number(s):
7,521,257
Application Number:
10/777,282
OSTI ID:
986569
Country of Publication:
United States
Language:
English

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