Nonlinear nanomechanical oscillators for ultrasensitive inertial detection
Patent
·
OSTI ID:1093227
A system for ultrasensitive mass and/or force detection of this invention includes a mechanical oscillator driven to oscillate in a nonlinear regime. The mechanical oscillator includes a piezoelectric base with at least one cantilever resonator etched into the piezoelectric base. The cantilever resonator is preferably a nonlinear resonator which is driven to oscillate with a frequency and an amplitude. The system of this invention detects an amplitude collapse of the cantilever resonator at a bifurcation frequency as the cantilever resonator stimulated over a frequency range. As mass and/or force is introduced to the cantilever resonator, the bifurcation frequency shifts along a frequency axis in proportion to the added mass.
- Research Organization:
- ORNL (Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States))
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-00OR22725
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Number(s):
- 8,505,382
- Application Number:
- 13/024,797
- OSTI ID:
- 1093227
- Country of Publication:
- United States
- Language:
- English
Dynamic pull-in phenomenon in MEMS resonators
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journal | September 2006 |
Linear and Nonlinear Tuning of Parametrically Excited MEMS Oscillators
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journal | April 2007 |
Mass Sensing Based on Deterministic and Stochastic Responses of Elastically Coupled Nanocantilevers
|
journal | September 2009 |
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