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Title: Nonlinear nanomechanical oscillators for ultrasensitive inertial detection

Patent ·
OSTI ID:1093227

A system for ultrasensitive mass and/or force detection of this invention includes a mechanical oscillator driven to oscillate in a nonlinear regime. The mechanical oscillator includes a piezoelectric base with at least one cantilever resonator etched into the piezoelectric base. The cantilever resonator is preferably a nonlinear resonator which is driven to oscillate with a frequency and an amplitude. The system of this invention detects an amplitude collapse of the cantilever resonator at a bifurcation frequency as the cantilever resonator stimulated over a frequency range. As mass and/or force is introduced to the cantilever resonator, the bifurcation frequency shifts along a frequency axis in proportion to the added mass.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Number(s):
8,505,382
Application Number:
13/024,797
OSTI ID:
1093227
Country of Publication:
United States
Language:
English

References (14)

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Resonator with reduced acceleration sensitivity and phase noise using time domain switch patent April 2013
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Dynamic pull-in phenomenon in MEMS resonators journal September 2006
Linear and Nonlinear Tuning of Parametrically Excited MEMS Oscillators journal April 2007
Optical scanning device having a deflection mirror to scan a scanned surface at a constant velocity via a light beam to obtain a large effective write width patent June 2004
MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS patent November 2008
Method and instrument for mass analyzing samples with a quistor patent December 1990
Apparatus and method for vacuum-based nanomechanical energy force and mass sensors patent-application July 2005
Mass Sensing Based on Deterministic and Stochastic Responses of Elastically Coupled Nanocantilevers journal September 2009
Time of flight mass analyzer having improved mass resolution and method of operating same patent March 2007
Nanoscale relaxation oscillator patent April 2009
Multistable tunable micromechanical resonators patent June 1999
Multiharmonic galvanometric scanning device patent August 2009

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