Chemical sensor with oscillating cantilevered probe

Adams, Jesse D

Chemical sensor with oscillating cantilevered probe

Patent · Tue Feb 05 04:00:00 EST 2013

OSTI ID:1083222

Adams, Jesse D

The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

View Patent

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-00OR22725

Assignee:: Board of Regents of the Nevada System of Higher Education, On Behalf of the University of Nevada, Reno (Reno, NV)

Patent Number(s):: 8,367,426

Application Number:: 12/416,852

OSTI ID:: 1083222

Country of Publication:: United States

Language:: English

References (24)

Fabrication and application of polymer coated cantilevers as gas sensors Maute, M.; Raible, S.; Prins, F. E. Microelectronic Engineering, Vol. 46, Issue 1-4 https://doi.org/10.1016/S0167-9317(99)00128-8	journal	May 1999
Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators Minne, S. C.; Manalis, S. R.; Quate, C. F. Applied Physics Letters, Vol. 67, Issue 26 https://doi.org/10.1063/1.115317	journal	December 1995
Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films Zambov, L. M.; Popov, C.; Abedinov, N. Advanced Materials, Vol. 12, Issue 9 https://doi.org/10.1002/(SICI)1521-4095(200005)12:9<656::AID-ADMA656>3.0.CO;2-S	journal	May 2000
Piezoelectric cantilever array for multiprobe scanning force microscopy Itoh, T.; Ohashi, T.; Suga, T. Proceedings of Ninth International Workshop on Micro Electromechanical Systems https://doi.org/10.1109/MEMSYS.1996.494024	conference	January 1996
Characterization of application-specific probes for SPMs Tortonese, Marco; Kirk, Michael Photonics West '97, SPIE Proceedings https://doi.org/10.1117/12.271229	conference	April 1997
Surface micromachining for microelectromechanical systems Bustillo, J. M.; Howe, R. T.; Muller, R. S. Proceedings of the IEEE, Vol. 86, Issue 8 https://doi.org/10.1109/5.704260	journal	January 1998
Quality factors in micron- and submicron-thick cantilevers Yasumura, K. Y.; Stowe, T. D.; Chow, E. M. Journal of Microelectromechanical Systems, Vol. 9, Issue 1 https://doi.org/10.1109/84.825786	journal	March 2000
Parallel frequency readout of an array of mass-sensitive transducers for sensor applications Kim, B. H.; Maute, M.; Prins, F. E. Microelectronic Engineering, Vol. 53, Issue 1-4 https://doi.org/10.1016/S0167-9317(00)00303-8	journal	June 2000
Micromachined inertial sensors Yazdi, N.; Ayazi, F.; Najafi, K. Proceedings of the IEEE, Vol. 86, Issue 8 https://doi.org/10.1109/5.704269	journal	January 1998
Multi-frequency interrogation technique applied to conducting polymer gas and odour sensors Amrani, M. E. H.; Payne, P. A. IEE Proceedings - Science, Measurement and Technology, Vol. 146, Issue 2 https://doi.org/10.1049/ip-smt:19990288	journal	January 1999
Mesoporous Thin Films of “Molecular Squares” as Sensors for Volatile Organic Compounds Keefe, Melinda H.; Slone, Robert V.; Hupp, Joseph T. Langmuir, Vol. 16, Issue 8 https://doi.org/10.1021/la991252k	journal	April 2000
CMOS single-chip multisensor gas detection system Hagleitner, C.; Lange, D.; Kerness, N. Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) https://doi.org/10.1109/MEMSYS.2002.984248	conference	January 2002
Dual integrated actuators for extended range high speed atomic force microscopy Sulchek, T.; Minne, S. C.; Adams, J. D. Applied Physics Letters, Vol. 75, Issue 11 https://doi.org/10.1063/1.124779	journal	September 1999
Ultrahigh-density atomic force microscopy data storage with erase capability Binnig, G.; Despont, M.; Drechsler, U. Applied Physics Letters, Vol. 74, Issue 9 https://doi.org/10.1063/1.123540	journal	March 1999
Fabrication of biological microarrays using microcantilevers Belaubre, P.; Guirardel, M.; Garcia, G. Applied Physics Letters, Vol. 82, Issue 18 https://doi.org/10.1063/1.1565685	journal	May 2003
Influence of adsorption-desorption process on resonant frequency and noise of micro- and nanocantilevers Djuric, Z.; Jokic, I.; Franklovic, M. 23rd International Conference on Microelectronics (MIEL 2002), 2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) https://doi.org/10.1109/MIEL.2002.1003185	conference	January 2002
Temperature dependence of elastic, dielectric, and piezoelectric properties of “single crystalline’’ films of vinylidene fluoride trifluoroethylene copolymer Omote, Kenji; Ohigashi, Hiroji; Koga, Keiko Journal of Applied Physics, Vol. 81, Issue 6 https://doi.org/10.1063/1.364300	journal	March 1997
Temperature dependence of the piezoelectric response in lead zirconate titanate films Wolf, R. A.; Trolier-McKinstry, S. Journal of Applied Physics, Vol. 95, Issue 3 https://doi.org/10.1063/1.1636530	journal	February 2004
CMOS monolithic mechatronic microsystem for surface imaging and force response studies Barrettino, D.; Hafizovic, S.; Volden, T. IEEE Journal of Solid-State Circuits, Vol. 40, Issue 4 https://doi.org/10.1109/JSSC.2004.842868	journal	April 2005
Taking atomic force microscope advances to the university classroom Adams, J. D.; Priyadarshan, G.; Mabogunje, A. 2001 IEEE Aerospace Conference Proceedings (Cat. No.01TH8542) https://doi.org/10.1109/AERO.2001.931453	conference	January 2001
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions Savran, C. A.; Sparks, A. W.; Sihler, J. Journal of Microelectromechanical Systems, Vol. 11, Issue 6 https://doi.org/10.1109/JMEMS.2002.805057	journal	December 2002
Piezoresistive Signal Down Mixing for Parallel Detection of Si-Based Microcantilevers Resonant Frequencies Mathieu, F.; Saya, D.; Nicu, L. IEEE Sensors, 2005. https://doi.org/10.1109/ICSENS.2005.1597797	conference	January 2005
Detection of volatile organic compounds (VOCs) with polymer-coated cantilevers Maute, M.; Raible, S.; Prins, F. E. Sensors and Actuators B: Chemical, Vol. 58, Issue 1-3 https://doi.org/10.1016/S0925-4005(99)00110-0	journal	September 1999
On the modes and loss mechanisms of a high Q mechanical oscillator Liu, Xiao; Morse, S. F.; Vignola, J. F. Applied Physics Letters, Vol. 78, Issue 10 https://doi.org/10.1063/1.1350599	journal	March 2001

Similar Records

Chemical sensor with oscillating cantilevered probe and mechanical stop

Patent · Tue Apr 21 00:00:00 EDT 2009 · OSTI ID:986569

Nonlinear nanomechanical oscillators for ultrasensitive inertial detection

Patent · Tue Aug 13 00:00:00 EDT 2013 · OSTI ID:1093227

A Compact, Low-Power Cantilever-Based Sensor Array for Chemical Detection

Conference · Wed Feb 21 23:00:00 EST 2007 · OSTI ID:909629

Related Subjects

47 OTHER INSTRUMENTATION

Chemical sensor with oscillating cantilevered probe

Citation Formats

References (24)

Similar Records

Related Subjects