Woodpile Structure Fabrication for Photonic Crystal Laser Acceleration
Conference
·
· AIP Conf.Proc.1086:544-549,2009
OSTI ID:982715
We describe initial steps at fabricating a dielectric photonic bandgap accelerator structure designed to operate at near IR frequencies. Such a structure operating at these frequencies requires extremely small, sub-micron sized features, forcing one to use lithographic means for fabrication. A process based upon lithographic equipment at the Stanford Nanofabrication Facility has been developed and a four layer test structure has been fabricated. Unexpected problems with the final etch step, and corresponding modifications to the process flow addressing these problems, are described. Spectroscopic measurements of the structure have been taken and are compared to simulations.
- Research Organization:
- SLAC National Accelerator Laboratory (SLAC)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-76SF00515
- OSTI ID:
- 982715
- Report Number(s):
- SLAC-PUB-13414
- Conference Information:
- Journal Name: AIP Conf.Proc.1086:544-549,2009
- Country of Publication:
- United States
- Language:
- English
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