Woodpile Structure Fabrication for Photonic Crystal Laser Acceleration

Conference · Wed Jun 30 00:00:00 EDT 2010 · AIP Conf.Proc.1086:544-549,2009

OSTI ID:982715

McGuinness, C; Byer, R L; Colby, E; Cowan, B M; England, R J; Noble, R J; Plettner, T; Sears, C M; Siemann, R; Spencer, J; Waltz, D

We describe initial steps at fabricating a dielectric photonic bandgap accelerator structure designed to operate at near IR frequencies. Such a structure operating at these frequencies requires extremely small, sub-micron sized features, forcing one to use lithographic means for fabrication. A process based upon lithographic equipment at the Stanford Nanofabrication Facility has been developed and a four layer test structure has been fabricated. Unexpected problems with the final etch step, and corresponding modifications to the process flow addressing these problems, are described. Spectroscopic measurements of the structure have been taken and are compared to simulations.

• Research Organization: SLAC National Accelerator Lab., Menlo Park, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC02-76SF00515
• OSTI ID: 982715
• Report Number(s): SLAC-PUB-13414; TRN: US1004288
• Journal Information: AIP Conf.Proc.1086:544-549,2009, Conference: Invited talk at 13th Advanced Accelerator Concepts Workshop (AAC08), Santa Cruz, California, 27 Jul - 2 Aug 2008
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
43 PARTICLE ACCELERATORS
ACCELERATION
ACCELERATORS
DIELECTRIC MATERIALS
FABRICATION
LASERS
MODIFICATIONS
Accelerators
ACCPHY