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Fabrication and Characterization of Woodpile Structures for Direct Laser Acceleration

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.3520360· OSTI ID:21428810
; ;  [1]; ; ; ; ; ;  [1];  [2];  [3]
  1. SLAC National Accelerator Laboratory, 2575 Sand Hill Rd. Melo Park, CA 94025 (United States)
  2. Tech-X Corporation, 5621 Arapahoe Ave., Boulder, CO 80303 (United States)
  3. E.L. Ginzton Laboratory, Nano Center Building, 348 Via Pueblo Mall, Stanford, CA 94305-4088 (United States)
Eight and nine layer three dimensional photonic crystals with a defect designed specifically for accelerator applications have been fabricated. The structures were fabricated using a combination of nanofabrication techniques, including low pressure chemical vapor deposition, optical lithography, and chemical mechanical polishing. Limits imposed by the optical lithography set the minimum feature size to 400 nm, corresponding to a structure with a bandgap centered at 4.26 {mu}m. Reflection spectroscopy reveal a peak in reflectivity about the predicted region, and good agreement with simulation is shown. The eight and nine layer structures will be aligned and bonded together to form the complete seventeen layer woodpile accelerator structure.
OSTI ID:
21428810
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1299; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English