Woodpile Structure Fabrication for Photonic Crystal Laser Acceleration

Journal Article · Thu Jan 22 04:00:00 EST 2009 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3080965· OSTI ID:21255277

McGuinness, C; Colby, E; England, R J; Noble, R J; Sears, C M; Siemann, R; Spencer, J; Waltz, D ^[1]; Byer, R L; Plettner, T ^[2]; Cowan, B M ^[3]

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1. Stanford Linear Accelerator Center, 2575 Sand Hill Road, Menlo Park, CA 94025 (United States)
2. Ginzton Labs, Stanford University, Stanford, CA 94309 (United States)
3. Tech-X (United States)

We describe initial steps at fabricating a dielectric photonic bandgap accelerator structure designed to operate at near IR frequencies. Such a structure operating at these frequencies requires extremely small, sub-micron sized features, forcing one to use lithographic means for fabrication. A process based upon lithographic equipment at the Stanford Nanofabrication Facility has been developed and a four layer test structure has been fabricated. Unexpected problems with the final etch step, and corresponding modifications to the process flow addressing these problems, are described. Spectroscopic measurements of the structure have been taken and are compared to simulations.

• OSTI ID: 21255277
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1086; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCELERATION
CRYSTALS
DIELECTRIC MATERIALS
FABRICATION
LASERS
LAYERS
MICROWAVE RADIATION
NANOSTRUCTURES
SIMULATION
WAKEFIELD ACCELERATORS