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Synthesis and characterization of smooth ultrananocrystalline diamond films via low pressure bias-enhanced nucleation and growth.

Journal Article · Mon Dec 31 23:00:00 EST 2007 · Appl. Phys. Lett.

DOI:https://doi.org/10.1063/1.2838303· OSTI ID:978983

Chen, Y C; Zhong, X Y; Konicek, A R; Grierson, D S; Tai, N H; Lin, I N; Kabius, B; Hiller, J M; Sumant, A V; Carpick, R W; Auciello, O

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Research Organization:: Argonne National Laboratory (ANL)

Sponsoring Organization:: SC; NSF; Air Force Office of Scientific Research

DOE Contract Number:: AC02-06CH11357

OSTI ID:: 978983

Report Number(s):: ANL/MSD/JA-60957

Journal Information:: Appl. Phys. Lett., Journal Name: Appl. Phys. Lett. Journal Issue: 2008 Vol. 92

Country of Publication:: United States

Language:: ENGLISH

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