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Enhanced nucleation, smoothness and conformality of ultrananocrystalline diamond (UNCD) ultrathin films via tungsten interlayers.

Journal Article · Sat Dec 31 23:00:00 EST 2005 · Appl. Phys. Lett.

DOI:https://doi.org/10.1016/j.cplett.2006.08.137· OSTI ID:926982

Naguib, N N; Elam, J W; Birrell, J; Wang, J; Kabius, B; Hiller, J M; Auciello, O; Carlisle, J A

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Research Organization:: Argonne National Laboratory (ANL)

Sponsoring Organization:: SC

DOE Contract Number:: AC02-06CH11357

OSTI ID:: 926982

Report Number(s):: ANL/MSD/JA-55875

Journal Information:: Appl. Phys. Lett., Journal Name: Appl. Phys. Lett. Journal Issue: 4-6 ; 2006 Vol. 430

Country of Publication:: United States

Language:: ENGLISH

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