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An energy spread correction for ERDA hydrogen depth profiling

Conference ·
OSTI ID:976443

A technique for hydrogen depth profiling by reflection elastic recoil detection analysis called the channel-depth conversion was introduced by Verda, et al.' However, the energy spread in elastic recoil detection analysis spectra, which causes a broadening in the energy range and leads to errors in depth profiling, was not addressed by this technique. Here we introduce a technique to addresses this problem, called the energy spread correction. Together, the energy spread correction and the channel-depth conversion techniques comprise the depth profiling method presented in this work.

Research Organization:
Los Alamos National Laboratory
Sponsoring Organization:
DOE
OSTI ID:
976443
Report Number(s):
LA-UR-02-7137
Country of Publication:
United States
Language:
English

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