An energy spread correction for ERDA hydrogen depth profiling
Conference
·
OSTI ID:976443
- Raymond D.
A technique for hydrogen depth profiling by reflection elastic recoil detection analysis called the channel-depth conversion was introduced by Verda, et al.' However, the energy spread in elastic recoil detection analysis spectra, which causes a broadening in the energy range and leads to errors in depth profiling, was not addressed by this technique. Here we introduce a technique to addresses this problem, called the energy spread correction. Together, the energy spread correction and the channel-depth conversion techniques comprise the depth profiling method presented in this work.
- Research Organization:
- Los Alamos National Laboratory
- Sponsoring Organization:
- DOE
- OSTI ID:
- 976443
- Report Number(s):
- LA-UR-02-7137
- Country of Publication:
- United States
- Language:
- English
Similar Records
Accurate hydrogen depth profiling by reflection elastic recoil detection analysis
Hydrogen depth profiling using elastic recoil detection
Ion beam analysis for depth profiling
Conference
·
Sun Dec 31 23:00:00 EST 2000
·
OSTI ID:975646
Hydrogen depth profiling using elastic recoil detection
Conference
·
Sun Dec 31 23:00:00 EST 1978
·
OSTI ID:6488071
Ion beam analysis for depth profiling
Conference
·
Sun Nov 10 23:00:00 EST 1991
· Journal of Vacuum Science and Technology A
·
OSTI ID:5989898