Hydrogen depth profiling using elastic recoil detection
Conference
·
OSTI ID:6488071
The elastic recoil detection (ERD) analysis technique for H profiling in the near surface regions of solids is described. ERD is shown to have the capability of detecting H and its isotopes down to concentrations of approx. 0.01 at. % with a depth resolution of a few hundred angstroms. Is is demonstrated that 2.4-MeV He ions can be used successfully to profile /sup 1/H and /sup 2/D using this technique. 12 figures.
- Research Organization:
- Sandia Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- EY-76-C-04-0789
- OSTI ID:
- 6488071
- Report Number(s):
- SAND-79-0210C; CONF-790127-2
- Country of Publication:
- United States
- Language:
- English
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Journal Article
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· Appl. Phys. Lett.; (United States)
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OSTI ID:6336427
Accurate hydrogen depth profiling by reflection elastic recoil detection analysis
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OSTI ID:975646
Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400103* -- Radiometric & Radiochemical Procedures-- (-1987)
CARBON 12
CARBON ISOTOPES
CHEMICAL ANALYSIS
COMPARATIVE EVALUATIONS
DEPTH
DIMENSIONS
ELASTIC SCATTERING
ENERGY RANGE
EVEN-EVEN NUCLEI
FLUORINE 19
FLUORINE ISOTOPES
HELIUM IONS
HYDROGEN ISOTOPES
ION SCATTERING ANALYSIS
ISOTOPES
LIGHT NUCLEI
MEV RANGE
NONDESTRUCTIVE ANALYSIS
NUCLEAR REACTION ANALYSIS
NUCLEI
ODD-EVEN NUCLEI
RECOILS
SCATTERING
SOLIDS
STABLE ISOTOPES
SURFACES
400103* -- Radiometric & Radiochemical Procedures-- (-1987)
CARBON 12
CARBON ISOTOPES
CHEMICAL ANALYSIS
COMPARATIVE EVALUATIONS
DEPTH
DIMENSIONS
ELASTIC SCATTERING
ENERGY RANGE
EVEN-EVEN NUCLEI
FLUORINE 19
FLUORINE ISOTOPES
HELIUM IONS
HYDROGEN ISOTOPES
ION SCATTERING ANALYSIS
ISOTOPES
LIGHT NUCLEI
MEV RANGE
NONDESTRUCTIVE ANALYSIS
NUCLEAR REACTION ANALYSIS
NUCLEI
ODD-EVEN NUCLEI
RECOILS
SCATTERING
SOLIDS
STABLE ISOTOPES
SURFACES